Revised fabrication process for micro-fluxgate-magnetometers: Usage of electrodepositable photoresist

Kirchhoff, Maren Ramona; Güttler, J.; Waldschik, A.; Feldmann, M.; Büttgenbach, S.

doi:10.1016/j.mee.2007.12.002

Cited by 14 publications

(10 citation statements)

References 3 publications

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“…The excitation coils are the first layer, and after that NiFe layer was deposited on the top, and helical coil were pattered around the core (Figure 20). [96] Zorlu et al fabricated a new cascade 18 ring core (NiFe) fluxgate sensor. Planar coils were deposited along the concentric cores that are used as a sensing element.…”

Section: Advancements In Microtechnology Fluxgate Sensormentioning

confidence: 99%

Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

2022

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Research on magnetic sensors has been carried out in recent years to enhance sensing capability, enabling us to understand the Earth's magnetic field changes [1] with better sensitivities of 10 À10 to 10 À2 T. [2] Magnetic field sensors have been extensively investigated according to their operating principles and actions in various applications. Sensitivity and selectivity are the two essential properties crucial in the evolution of magnetic field sensors to achieve high fidelity outputs. The former is strengthened by increasing the sensor area and improvements to the planar surface with various Nano-materials. In contrast, the latter is improved by using multiple materials and techniques to enhance interfacial interactions.Magnetic sensors detect disturbances and changes in magnetic fields such as force, direction, and flux. It is a transducer that converts a magnetic field into an electrical voltage. There are several types of magnetic field sensors, each with its own sensitivity range. In addition to sensitivity, the temperature range, the physical size of the sensor, and its on-chip manufacturability must all be considered. Magnetic fields of less than 100 pT are extremely weak and far below the earth's magnetic field. Earth magnetic field sensors have a sensitivity range of 10 μT to a few micro-Tesla, while bias magnet field (high field) sensors have a sensitivity of more than 1 mT.Magnetic fields of less than 100 pT are extremely weak and far below the earth's magnetic field. Earth magnetic field sensors have a sensitivity range of 10 μT to a few micro-Tesla, while bias magnet field (high field) sensors have a sensitivity of more than 1 mT. The most sensitive low-field sensor is the superconducting quantum interference device (SQUID). It is based on Brian J. Josephson's research on a point-contact connection for measuring extremely low currents.The SQUID ring, the radio-frequency coil, and the big antenna loop are all superconducting components of the SQUID sensor. All three must be cooled to the point where they become superconducting. The SQUID itself is small, but the requirement for liquid helium cooling makes the entire apparatus big and hefty. Magnetoresistive sensors (MR) have a high sensitivity, are inexpensive to manufacture, and are small in size. However, they have poor noise performance and linearity, as well as a small dynamic range, making them unappealing and unsuitable for many low-noise applications. Furthermore, as the power usage is reduced, their sensitivity degrades.Search-coil or induction sensors are high-sensitivity, lowpower sensors, but their sensitivity decreases as the cross-section area decreases, making miniaturization ineffective. Because search coils can detect an alternating current magnetic field, they cannot detect a static magnetic field like the Earth's magnetic field. Magnetic sensors based on semiconductors, such as Hall-Effect sensors, magnetotransistors, and magnetodiodes, are very small in size. Because of its low manufacturing cost

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Section: Advancements In Microtechnology Fluxgate Sensormentioning

confidence: 99%

Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

2022

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“…A number of different methods have been tried to build helical microstructures, including common microfabrication methods (Kirchhoff et al 2008;Dean et al 2000) and extrusion-based fabrication methods (Ladd et al 2013;Lebel et al 2010;Yamada et al 2008;Therriault et al 2003). Most of common techniques have material constraints and require special processing conditions as well as high-demanding fabricating environments, while extrusion-based fabrication techniques show great potential with advantages of cost-effectiveness and availability of wide ranging materials.…”

Section: Preparation Of Helical Microstructurementioning

confidence: 99%

Facile fabrication of helical microfluidic channel based on rope coiling effect

et al. 2016

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“…The negative working electrodepositable (ED) photoresist Intervia 3D-N is used for this production step (Fig. 5) [8]. For the electrophoresis process first a copper seedlayer is sputtered onto the substrate, which serves as cathode.…”

Section: Fabricationmentioning

confidence: 99%

Design, fabrication and characterization of a micro-fluxgate intended for parallel robot application

2009

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This paper presents a micro-magnetometer based on the fluxgate principle. Fluxgates detect the magnitude and direction of DC and low-frequency AC magnetic fields. The detectable flux density typically ranges from several 10 nT to about 1 mT. The introduced fluxgate sensor is fabricated using MEMS-technologies, basically UV depth lithography and electroplating for manufacturing high aspect ratio structures. It consists of helical copper coils around a soft magnetic nickel-iron (NiFe) core. The core is designed in so-called racetrack geometry, whereby the directional sensitivity of the sensor is considerably higher compared to common ring-core fluxgates. The electrical operation is based on analyzing the 2 nd harmonic of the AC output signal. Configuration, manufacturing and selected characteristics of the fluxgate magnetometer are discussed in this work. The fluxgate builds the basis of an innovative angular sensor system for a parallel robot with HEXA-structure. Integrated into the passive joints of the parallel robot, the fluxgates are combined with permanent magnets rotating on the joint shafts. The magnet transmits the angular information via its magnetic orientation. In this way, the angles between the kinematic elements are measured, which allows self-calibration of the robot and the fast analytical solution of direct kinematics for an advanced workspace monitoring.

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Revised fabrication process for micro-fluxgate-magnetometers: Usage of electrodepositable photoresist

Cited by 14 publications

References 3 publications

Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

Facile fabrication of helical microfluidic channel based on rope coiling effect

Design, fabrication and characterization of a micro-fluxgate intended for parallel robot application

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