1995
DOI: 10.1016/0022-3115(94)00376-9
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Revised formulae for sputtering data

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Cited by 165 publications
(128 citation statements)
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“…The other formulas for low-energy sputtering yields [5][6][7][8][9][10] are also found to be inconsistent with our MD simulation results or the experimental data. Among them, Zalm et al's formula 5 has the minimum deviation, as shown in Fig.…”
Section: Resultscontrasting
confidence: 50%
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“…The other formulas for low-energy sputtering yields [5][6][7][8][9][10] are also found to be inconsistent with our MD simulation results or the experimental data. Among them, Zalm et al's formula 5 has the minimum deviation, as shown in Fig.…”
Section: Resultscontrasting
confidence: 50%
“…Meanwhile, our MD simulation results and the experimental data do not support the improved formulas of low-energy sputtering yields suggested by others based on Sigmund's theory. [5][6][7][8][9][10] On the other hand, we find that Eq. (10) can be used to fit the MD simulation results, and the data has a deviation smaller than the formulas based on Sigmund's theory, but larger than in the case of M 1 < M 2 .…”
Section: Resultsmentioning
confidence: 65%
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“…, ( ) = Energy dependence of sputtering of ei by ej , = Areal density of component ek on wall element wr = Free parameter describing the composition dependence The Bohdansky formula [12,13] is used for physical sputtering , ( ) of elements which has two free parameters ( ℎ , Q) is used. For the composition dependence a linear function is used excluding the terms where = .…”
Section: Modelingmentioning
confidence: 99%
“…It is well known that a physical sputtering yield is a function of incident ion energy. The Bohdansky formulae for physical sputtering yield has been given as [16], [17] …”
Section: Wall-sputtering Models For Iter-like Wallmentioning
confidence: 99%