Revisiting the anomalous RF field penetration into a warm plasma

Kaganovich, Igor; Polomarov, Oleg; Theodosiou, Constantine E.

doi:10.1109/tps.2006.873253

Cited by 79 publications

(82 citation statements)

References 37 publications

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“…the electrons adjacent to the sheath edge are accelerated by a single interaction with the expanding sheath into the plasma bulk. This is similar to Fermi heating [15] and has been described by the Hard Wall Model [16] or other more elaborated models [17][18][19][20][21][22][23][24][25][26][27][28][29]. Here, we demonstrate that this understanding is not complete, via a modeling study of symmetric argon and helium plasmas driven at 13.56 MHz.…”

Section: Introductionsupporting

confidence: 75%

The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

Schulze

Donkó

Derzsi

et al. 2014

Plasma Sources Sci. Technol.

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Abstract. We investigate the electron heating dynamics in electropositive argon and helium capacitively coupled RF discharges driven at 13.56 MHz by Particle in Cell simulations and by an analytical model. The model allows to calculate the electric field outside the electrode sheaths, space and time resolved within the RF period. Electrons are found to be heated by strong ambipolar electric fields outside the sheath during the phase of sheath expansion in addition to classical sheath expansion heating. By tracing individual electrons we also show that ionization is primarily caused by electrons that collide with the expanding sheath edge multiple times during one phase of sheath expansion due to backscattering towards the sheath by collisions. A synergistic combination of these different heating events during one phase of sheath expansion is required to accelerate an electron to energies above the threshold for ionization. The ambipolar electric field outside the sheath is found to be time modulated due to a time modulation of the electron mean energy caused by the presence of sheath expansion heating only during one half of the RF period at a given electrode. This time modulation results in more electron heating than cooling inside the region of high electric field outside the sheath on time average. If an electric field reversal is present during sheath collapse, this time modulation and, thus, the asymmetry between the phases of sheath expansion and collapse will be enhanced. We propose that the ambipolar electron heating should be included in models describing electron heating in capacitive RF plasmas.

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Section: Introductionsupporting

confidence: 75%

The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

Schulze

Donkó

Derzsi

et al. 2014

Plasma Sources Sci. Technol.

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“…So it is doubtful if any gaseous plasma is accurately described by this theory, although there might be solid state plasmas compatible with these assumptions. However, this line of theoretical investigation has recently been revisited by Kaganovich et al [38,15]. Their approach aims to treat the sheath structure by the assuming the existence of a step function in the plasma density at the ion sheath edge, so that there is a uniform density n b in the bulk plasma and a uniform density n s in the sheath, with a step at the interface between the plasma and the sheath.…”

Section: Single Frequency Dischargesmentioning

confidence: 99%

“…(54) is easy to evaluate and is fairly consistent with simulation and experimental data, insofar as systematic comparisons exist. The most recent variation of on this approach is due to Kaganovich et al [15]. Their model differs from Eq.…”

Section: Hard Wall Modelsmentioning

confidence: 99%

“…Evidently, some understanding of the nature of the heating mechanism is a prerequisite for this approach. The scope of this review is limited to exploration of the mechanisms themselves, in the context of rather simple models of the bulk plasma, and we will not, therefore, discuss the question of how collisionless heating influences the electron energy distribution function beyond the remarks already made, but we note that there an extensive literature on this important and interesting topic [15]. Valuable but not specially recent reviews of these and related issues are by Kolobov and Godyak [5] and Kortshagen et al [6].…”

Section: Introductionmentioning

confidence: 99%

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Collisionless heating in radio-frequency discharges: a review

Turner¹

2009

J. Phys. D: Appl. Phys.

121

117

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Abstract. Radio-frequency discharges are practically and scientifically interesting. A practical understanding of such discharges requires, among other things, a quantitative appreciation of the mechanisms involved in heating electrons, since this heating is the proximate cause of the ionization that sustains the plasma. When these discharges are operated at sufficiently low pressure, collisionless electron heating can be an important and even the dominant mechanism. Since the low pressure regime is important for many applications, understanding collisionless heating is both theoretically and practically important. This review is concerned with the state of theoretical knowledge of collisionless heating in both inductive and capacitive discharges.

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“…On account of increasing industrial applications [1][2][3][4][5] like semiconductor fabrication, flat panel display and thin film deposition, radio frequency (RF) capacitively coupled plasma (CCP) discharges is a subject of intensive experimental and theoretical research. In general the capacitive discharge is agitated by applying a potential across the electrodes in contact with plasma [6]; naturally it leads to a plasma sheath formation near electrodes with a span of electric field characterised by Debye length (λ d ).…”

Section: Introductionmentioning

confidence: 99%

Effect of Mass and Charge of Ionic Species on Spatio‐Temporal Evolution of Transient Electric Field in CCP Discharges

Sharma

Mishra

Kaw

et al. 2015

Contrib. Plasma Phys.

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The formation of capacitive sheath and existence of the transition electric field between sheath edge and bulk plasma in RF-CCP discharge is predicted (PRL 89, 265006 2002); such structures are sensitive to the plasma composition. On the basis of semi-infinite particle-in-cell (PIC) simulation the effect of charge and mass of ionic species on the spatio-temporal evolution of the transient electric field and phase mixing phenomena in linear and weakly nonlinear regime has been explored. As an important feature, the simulation results predict that the maximum amplitude of the transient electric field decreases with increasing ionic mass and charge; further the sheath width increases with increasing ionic mass while follow opposite trend with increasing ionic charge. The excitation of wave like structures in the transition region and efficient energy transport to the bulk region of CCP discharges in a nonlinear regime has also been predicted.

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Revisiting the anomalous RF field penetration into a warm plasma

Cited by 79 publications

References 37 publications

The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

Collisionless heating in radio-frequency discharges: a review

Effect of Mass and Charge of Ionic Species on Spatio‐Temporal Evolution of Transient Electric Field in CCP Discharges

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