RF aerosol plasma fabrication of indium tin oxide and tin oxide thin films

Abstract

Transparent, conductive indium-tin oxide (ITO) and tin oxide thin films were deposited on soda-lime-silicate (SLS) float glass and silica glass substrates by an RF aerosol plasma technique in an atmospheric environment. The ITO films were deposited from solutions with various In: Sn ratios. The dependence of the film properties on the substrate temperature, deposition time, and tin concentration has been studied. The films were characterized by several techniques including XRD, EDS, electrical resistivity, SEM, optical (IR-UV-Vis transmission), Mössbauer, and infrared spectroscopy. The results showed that film phase, morphology, thickness, crystallite size, and conductivity depend on the solution composition and deposition parameters. XRD revealed that In2O3 was present in the film when a In: Sn ratio of 5: 5 or higher was used; otherwise only SnO2 shown. SEM analysis showed that dense and uniform films were formed with particle sizes ranging from approximately 50 nm to 150 nm. The resistivity of the ITO films ranged from 0.12 to 5.0 ohm-cm at room temperature. Optical transmission of the ITO-coated glasses was not different from the uncoated samples. Infrared results indicated that the structure of the near surface of the glasses was significantly modified with a higher indium concentration. The advantages of the atmospheric, RF aerosol plasma deposition process over other techniques are discussed.

Resistive CO gas sensors based on In2O3 and InSnOx nanopowders synthesized via starch-aided sol–gel process for automotive applications

“…These results are in agreement with previous pyrolysis data of other nanometric oxide nanoparticles obtained with starch stabilization [16]. The In 2 O 3 -SnO 2 system is widely studied owing to the commercial application of ITO films [27,28] and its intriguing solid structure [29]. It is well known that the two oxides form a solid solution if the at.% of tin is less than 11% [30,31].…”

Preparation of indium tin oxide nanoparticles and their application to near IR-reflective film

“…It was found that the atomic molar percent of indium to tin was determined as 9:1. Generally, when the In:Sn molar ratio is determined as 9:1, ITO nanoparticles have the highest conductivity [5]. According to XRD and EDS data, it was known that ITO nanoparticles with In:Sn = 9:1 (at.…”

“…Indium tin oxide (ITO) films have high visible transmittance, high infrared reflectance, good electrical conductivity, excellent substrate adherence and hardness [3,4]. Those properties have made ITO thin films applied as transparent electrodes for use in liquid crystal display (LCD), plasma display panel (PDP), coating material for use in CRT, transparent conducting thin films, low-emissive windows and solar cells [5]. While several synthesis and processing methods such as sputtering, spray pyrolysis, CVD and dip coating methods have been employed for making thin films of TCOs, research on nanoparticles and quantum dot structures is still quite sparse [5][6][7][8].…”

“…Those properties have made ITO thin films applied as transparent electrodes for use in liquid crystal display (LCD), plasma display panel (PDP), coating material for use in CRT, transparent conducting thin films, low-emissive windows and solar cells [5]. While several synthesis and processing methods such as sputtering, spray pyrolysis, CVD and dip coating methods have been employed for making thin films of TCOs, research on nanoparticles and quantum dot structures is still quite sparse [5][6][7][8]. In previous researches on ITO nanoparticles, metal alkoxides were used as raw materials for preparing ITO nanoparticles, but it was very difficult to obtain indium and tin alkoxide because of preparation problems, unavailability, or expensive cost.…”

Effect of surfactants on the structure and photoelectric properties of ITO films by sol-gel method

“…Films with (100) predominant plane were obtained using the atomic layer epitaxy deposition technique [15]. Other researchers [16][17] have noted the preferred orientation of In 2 O 3 crystals toward the (111) or (100) plane, although it did not have any direct effect on reducing film resistivity. Zhu et al [18] used surfactant polyethylene glycol (PEG) to control the morphology of ITO nanorods that present the ratio of length to diameter about 10.…”