RF magnetron sputtered AlCoCrCu0.5FeNi high entropy alloy (HEA) thin films with tuned microstructure and chemical composition

Khan, N. A.; Akhavan, Behnam; Zhou, Chengxin; Zhou, Haoruo; Chang, Li; Wang, Yu; Liu, Yanping; Fu, Li; Bilek, M.M.M.; Liu, Zongwen

doi:10.1016/j.jallcom.2020.155348

Cited by 55 publications

(21 citation statements)

References 42 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…According to the reported methods for preparing HEA coatings, the surface modification techniques include electrochemical deposition ( Soare et al, 2015 ), physical vapor deposition (PVD) ( Khan et al, 2020 ; Xia et al, 2020 ), laser cladding ( Zhang et al, 2017 ; Guo et al, 2018 ; Wang L. et al, 2019 ), plasma cladding ( Anupam et al, 2019 ; Peng et al, 2019 ; Zhu et al, 2020 ), and thermal spraying ( Wang et al, 2011 ; Vallimanalan et al, 2020 ), etc. Particularly, the magnetron sputtering and laser cladding in the biomedical field are two relatively promising technologies for the preparation of HEA coatings.…”

Section: Fabrication Methods Of Titanium Based Heasmentioning

confidence: 99%

Research Progress of Titanium-Based High Entropy Alloy: Methods, Properties, and Applications

Liu

et al. 2020

Front. Bioeng. Biotechnol.

View full text Add to dashboard Cite

With the continuous progress and development in the biomedicine field, metallic biomedical materials have attracted the considerable attention of researchers, but the related procedures need to be further developed. Since the traditional metal implant materials are not highly compatible with the human body, the modern materials with excellent mechanical properties and proper biocompatibility should be developed urgently in order to solve any adverse reactions caused by the long-term implantations. The advent of the high-entropy alloy (HEA) as an innovative and advanced idea emerged to develop the medical implant materials through the specific HEA designs. The properties of these HEA materials can be predicted and regulated. In this paper, the progression and application of titanium-based HEAs, as well as their preparation and biological evaluation methods, are comprehensively reviewed. Additionally, the prospects for the development and use of these alloys in implant applications are put forward.

show abstract

Section: Fabrication Methods Of Titanium Based Heasmentioning

confidence: 99%

Research Progress of Titanium-Based High Entropy Alloy: Methods, Properties, and Applications

Liu

et al. 2020

Front. Bioeng. Biotechnol.

View full text Add to dashboard Cite

show abstract

“…The reasons for the manufacturing of thin film CCAs are their improved mechanical strength [ 10 , 11 ] and corrosion resistance [ 12 ] compared to the behavior of conventional metals and alloy layers. Different sputtering methods have been applied in the literature for the production of CCA coatings [ 13 , 14 , 15 , 16 , 17 ]. These techniques often produce microstructures which are far from the equilibrium phase composition [ 14 ].…”

Section: Introductionmentioning

confidence: 99%

“…These techniques often produce microstructures which are far from the equilibrium phase composition [ 14 ]. It has been shown that the conditions of sputtering can influence the chemical composition and the microstructure of the sample [ 16 ]. In addition, the microstructure and the phase composition can be tailored by varying the concentrations of the principal chemical elements in order to achieve the best combination of the functional and mechanical properties of CCA films [ 18 ].…”

Section: Introductionmentioning

confidence: 99%

Combinatorial Study of Phase Composition, Microstructure and Mechanical Behavior of Co-Cr-Fe-Ni Nanocrystalline Film Processed by Multiple-Beam-Sputtering Physical Vapor Deposition

et al. 2022

View full text Add to dashboard Cite

A combinatorial Co-Cr-Fe-Ni compositional complex alloy (CCA) thin film disk with a thickness of 1 µm and a diameter of 10 cm was processed by multiple-beam-sputtering physical vapor deposition (PVD) using four pure metal sources. The chemical composition of the four constituent elements varied between 4 and 64 at.% in the film, depending on the distance from the four PVD sources. The crystal structure, the crystallite size, the density of lattice defects (e.g., dislocations and twin faults) and the crystallographic texture were studied as a function of the chemical composition. It was found that in a wide range of elemental concentrations a face-centered cubic (fcc) structure with {111} crystallographic texture formed during PVD. Considering the equilibrium phase diagrams, it can be concluded that mostly the phase composition of the PVD layer is far from the equilibrium. Body-centered cubic (bcc) and hexagonal-close packed (hcp) structures formed only in the parts of the film close to Co-Fe and Co-Cr sources, respectively. A nanocrystalline microstructure with the grain size of 10–20 nm was developed in the whole layer, irrespective of the chemical composition. Transmission electron microscopy indicated a columnar growth of the film during PVD. The density of as-grown dislocations and twin faults was very high, as obtained by synchrotron X-ray diffraction peak profile analysis. The nanohardness and the elastic modulus were determined by indentation for the different chemical compositions on the combinatorial PVD film. This study is the continuation of a former research published recently in Nagy et al., Materials 14 (2021) 3357. In the previous work, only the fcc part of the sample was investigated. In the present paper, the study was extended to the bcc, hcp and multiphase regions.

show abstract

“…In recent years, studies about HEA thin films started to appear more frequently in the literature. The manufacturing of HEA thin films utilizes many methods and techniques, such as direct-current magnetron sputtering [ 7 , 8 ], thermal evaporation [ 9 ], radio-frequency sputtering [ 10 ], or multibeam sputtering [ 11 ]. HEA thin films attract attention due to their immense potential in applications on account of their outstanding mechanical properties.…”

Section: Introductionmentioning

confidence: 99%

“…In the work of Dolique et al, it was shown that in the case of a magnetron-sputtered Al-Co-Cr-Cu-Fe-Ni HEA thin-film sample, even a small difference in the stoichiometry could lead to a different structure and thermal stability [ 13 ]. In the case of an Al-Co-Cr-Cu 0.5 -Fe-Ni thin film deposited by radio-frequency magnetron sputtering, it was shown how the sputtering condition could be used to tailor the microstructure and the chemical composition of the sample [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

Microstructure, Hardness, and Elastic Modulus of a Multibeam-Sputtered Nanocrystalline Co-Cr-Fe-Ni Compositional Complex Alloy Film

et al. 2021

View full text Add to dashboard Cite

A nanocrystalline Co-Cr-Ni-Fe compositional complex alloy (CCA) film with a thickness of about 1 micron was produced by a multiple-beam-sputtering physical vapor deposition (PVD) technique. The main advantage of this novel method is that it does not require alloy targets, but rather uses commercially pure metal sources. Another benefit of the application of this technique is that it produces compositional gradient samples on a disk surface with a wide range of elemental concentrations, enabling combinatorial analysis of CCA films. In this study, the variation of the phase composition, the microstructure (crystallite size and defect density), and the mechanical performance (hardness and elastic modulus) as a function of the chemical composition was studied in a combinatorial Co-Cr-Ni-Fe thin film sample that was produced on a surface of a disk with a diameter of about 10 cm. The spatial variation of the crystallite size and the density of lattice defects (e.g., dislocations and twin faults) were investigated by X-ray diffraction line profile analysis performed on the patterns taken by synchrotron radiation. The hardness and the elastic modulus were measured by the nanoindentation technique. It was found that a single-phase face-centered cubic (fcc) structure was formed for a wide range of chemical compositions. The microstructure was nanocrystalline with a crystallite size of 10–27 nm and contained a high lattice defect density. The hardness and the elastic modulus values measured for very different compositions were in the ranges of 8.4–11.8 and 182–239 GPa, respectively.

show abstract

RF magnetron sputtered AlCoCrCu0.5FeNi high entropy alloy (HEA) thin films with tuned microstructure and chemical composition

Cited by 55 publications

References 42 publications

Research Progress of Titanium-Based High Entropy Alloy: Methods, Properties, and Applications

Research Progress of Titanium-Based High Entropy Alloy: Methods, Properties, and Applications

Combinatorial Study of Phase Composition, Microstructure and Mechanical Behavior of Co-Cr-Fe-Ni Nanocrystalline Film Processed by Multiple-Beam-Sputtering Physical Vapor Deposition

Microstructure, Hardness, and Elastic Modulus of a Multibeam-Sputtered Nanocrystalline Co-Cr-Fe-Ni Compositional Complex Alloy Film

Contact Info

Product

Resources

About