RF MEMS millimeter-wave switchable bandpass filter

Chan, King Yuk; Ramer, Rodica; Guo, Yanna

doi:10.1109/ieee-iws.2013.6616711

Cited by 10 publications

(4 citation statements)

References 18 publications

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“…Again, in this paper we cannot go into details. Various design possibilities; are outlined in [7][8][9][10].…”

Section: Rf-mems Reconfigurable Filtersmentioning

confidence: 99%

RF MEMS for Reconfigurable RF Front-End: Research in Australia

Gong¹,

Chan²,

Yang³

et al. 2014

AMR

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This paper reviews some ground breaking development of RF MEMS technology in Australia at the UNSW, over the past decade. It presents some unique and novel designs using RF MEMS switches to achieve reconfigurable RF front-end circuits. These designs include multiport RF MEMS switches, switch matrices, reconfigurable filters and antennas. The resulting devices achieved RF performance that is unmatched by any existing RF andmicrowave technologies.

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“…Again, in this paper we cannot go into details. Various design possibilities; are outlined in [7][8][9][10].…”

Section: Rf-mems Reconfigurable Filtersmentioning

confidence: 99%

RF MEMS for Reconfigurable RF Front-End: Research in Australia

Gong¹,

Chan²,

Yang³

et al. 2014

AMR

Self Cite

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“…To address the above challenging issues, researchers focus on exploring different fabrication processes to improve the integration and compactness, including multilayer printed circuit board (PCB) [3][4][5], low temperature cofired ceramic (LTCC) [6,7], silicon wafer [8][9][10][11], and other materials [12]. Multilayer PCB is often considered a low-cost technology, but it still suffers from the low integration density of electronic systems and low isolation.…”

Section: Introductionmentioning

confidence: 99%

3D Heterogenous Integrated Wideband Switchable Bandpass Filter Bank for Millimeter Wave Applications

Wang

Shu

et al. 2022

Electronics

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This article proposes a three-dimensional heterogenous-integrated (3DHI) switchable bandpass filter bank with two independent wideband filter channels that cover 26–40 GHz and 32.5–40 GHz, respectively. An accurate wafer-level process with a high hollowed ratio of the applied 8-inch high-resistivity-silicon (HR-Si) interposer wafers is presented to form both compact filter channels. Above the interdigital filter patterns fabricated on the bottom interposer wafer, deep cavities are etched in the cap interposer wafer to improve the quality factor of the filter bank. Besides the cavities, the cap interposer wafer is 35% hollow inside, which two bare dies of GaAs single-pole double-throw (SPDT) switches and two thin film resistors are attached to the bottom interposer after the wafer-to-wafer (W2W) bonding. To ensure good out-of-band performance, a 3D EM co-simulation of the switch layout at the chip level and filter patterns at the package level is applied. Measurement results show that the switchable filter bank achieves a high isolation of 50 dB and a competitive shape factor (BW30dB/BW3dB) of about 1.3. In addition, the size of the switchable filter bank is only 7.0 mm × 3.5 mm × 0.6 mm, and the weight is only 0.1 g.

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“…Most of the articles only describe the performance and lack some corresponding analysis methods. MEMS capacitive devices have demonstrated some superiorities [16,17], such as lower loss, lower parasitics and high linearity, in comparison to other varactor devices [18][19][20], it can be used in tuned filter [21] and reconfigurable antenna design [8,[22][23][24]. Bandstop DGS resonator is usually studied by using equivalent circuit model due to its slow-wave effect and band resistance characteristics [25,26], which is obtained by fitting resonant response curve [10,27].…”

Section: Introductionmentioning

confidence: 99%

Design, analysis and fabrication of the CPW resonator loaded by DGS and MEMS capacitors

Han

Liu

Guo

et al. 2021

J. Micromech. Microeng.

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In this paper, an analytical method of resonant frequency, tuning range, the effective relative dielectric constant, and characteristic impedance is proposed, which is for coplanar waveguide (CPW) resonator loaded by defected ground structure (DGS) and micro-electromechanical systems (MEMS) capacitors. The analytical solution is achieved by an employing equivalent method. The resonant frequency, tuning range, and effective relative dielectric constant are obtained by the analytical solution. For verifying the effectiveness of the proposed method, a CPW tunable bandstop filter (BSF) with DGS and MEMS capacitors is designed, simulated, and fabricated, results show good effectiveness of the proposed analysis method. By changing the height of the MEMS beam with the actuation voltage, the designed BSF can switch the center frequency among three states (i.e. 18.5 GHz, 18.2 GHz, 17.5 GHz, respectively), and fractional bandwidth is changed as well (i.e. 37.8%, 45.6%, 49.5%, respectively).

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RF MEMS millimeter-wave switchable bandpass filter

Cited by 10 publications

References 18 publications

RF MEMS for Reconfigurable RF Front-End: Research in Australia

RF MEMS for Reconfigurable RF Front-End: Research in Australia

3D Heterogenous Integrated Wideband Switchable Bandpass Filter Bank for Millimeter Wave Applications

Design, analysis and fabrication of the CPW resonator loaded by DGS and MEMS capacitors

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