RF MEMS Tunable Capacitor for Voltage-Controlled Oscillator Application in C-Band Range

Chatim, R.; Sandhagen, Carl; Bangert, A.

doi:10.1109/mms.2018.8611942

Cited by 2 publications

(1 citation statement)

References 3 publications

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“…Currently, efforts have been made to investigate tunable passive components such as capacitors and inductors for this goal. Between these two, tunable capacitors have been studied quite thoroughly from structure to material to have devices such as MEMS-based 2,3 and varactor based. 4,5 The need for tunable inductor is consistently high due to its many benefits in broad range applications.…”

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confidence: 99%

Experimental Demonstration of Vanadium Dioxide Phase Change Thin Film Based Tunable Spiral Inductors

Shin

Attariani

et al. 2020

ECS J. Solid State Sci. Technol.

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In this paper, a tunable spiral inductor integrated with vanadium dioxide (VO2) thin film on coplanar waveguide (CPW) transmission line is proposed. The tunable inductance is achieved by using the reversible, thermally controlled VO2 thin film. VO2 is one of metal to insulator phase transition (MIT) materials, which can be a potential solution for reconfigurable RF/microwave wireless communication systems. The VO2 based tunable inductors were fabricated on the sapphire substrate. A model is used to study the fingerprints of MIT and verify the nature of transition in the film. The scattering parameter measurements are taken in the frequency range from 10 MHz to 8 GHz with 801 points. The equivalent circuits have been used to characterize the behavior of tunable inductors and extract the equivalent component values, which show excellent matching to the measured S parameters. The measured results have shown an inductance tunability of 35.24% (3.856 nH−2.498 nH) at 4 GHz.

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confidence: 99%