RF-MEMS Uniplanar 180$^{\circ}$ Phase Switch Based on a Multimodal Air-Bridged CPW Cross

Llamas, M.A.; Girbau, David; Ribó, M.; Pradell, L.; Giacomozzi, F.; Colpo, S.

doi:10.1109/tmtt.2011.2140125

Cited by 13 publications

(14 citation statements)

References 13 publications

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“…Again, by controlling the values of Z A and Z B by means of MEMS switches, the amount of energy transfer among modes can be controlled. This transition and other described in [38][39][40] are the base for building multimodal uniplanar reconigurable circuits [6,[9][10][11]58] using MEMS switches.…”

Section: Asymmetric Shunt Impedances In a Cpwmentioning

confidence: 96%

“…Figure 21(b) shows the measured performance of the circuit, featuring a 180° ± 5° phase shift between both states in a bandwidth of 35% (14-20 GHz), with an insertion loss smaller than 2 dB in both paths. Figure 22(a) shows the photograph of a second compact, uniplanar 180° phase switch fabricated on a quarz substrate [10]. In this case, it is based on an air-bridged CPW cross [57].…”

Section: Phase Switchesmentioning

confidence: 99%

“…Radio frequency microelectromechanical system (RF-MEMS) switches are aimed to perform the control function in tunable and reconigurable RF/microwave and millimeter-wave (mmwave) systems. Electrostatic actuation is often preferred to other actuation mechanisms like electrothermal [1,2] and phase-change/phase-transition materials [3], due to its negligible current consumption, no requirement for external heating sources and integration capability with well-established technologies such as high-resistivity silicon [4][5][6][7], fused-quarz and glass substrates [8][9][10][11], or CMOS [12][13][14][15] and SiGe BiCMOS [16,17] processes. The later can provide totally integrated, eicient systems containing sensors, control electronics, and MEMS-reconigurable RF communication circuits [18].…”

Section: Introductionmentioning

confidence: 99%

“…Moreover, suitable equivalent circuits for both (ON/OFF) states of the switch can be obtained and integrated in the multimodal models. In this way, eicient and compact reconigurable circuits for communication systems at microwave and mm-wave frequencies can be designed [6,[9][10][11].…”

Section: Introductionmentioning

confidence: 99%

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MEMS Sensors - Design and Application

Yellampalli¹

2018

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Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconigurable microwave and millimeter (mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch conigurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, conirming the expected performances. Using an integrated RF-MEMS surface micromachining process, high-performance multimodal reconigurable circuits, such as phase switches and ilters, are developed with the proposed switch conigurations. The design and optimization of these circuits are discussed and the simulated results compared to measurements.

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Section: Asymmetric Shunt Impedances In a Cpwmentioning

confidence: 96%

Section: Phase Switchesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

MEMS Sensors - Design and Application

Yellampalli¹

2018

View full text Add to dashboard Cite

show abstract

“…Radio frequency microelectromechanical system (RF-MEMS) switches are aimed to perform the control function in tunable and reconfigurable RF/microwave and millimeter-wave (mmwave) systems. Electrostatic actuation is often preferred to other actuation mechanisms like electrothermal [1,2] and phase-change/phase-transition materials [3], due to its negligible current consumption, no requirement for external heating sources and integration capability with well-established technologies such as high-resistivity silicon [4][5][6][7], fused-quartz and glass substrates [8][9][10][11], or CMOS [12][13][14][15] and SiGe BiCMOS [16,17] processes. The latter can provide totally integrated, efficient systems containing sensors, control electronics, and MEMS-reconfigurable RF communication circuits [18].…”

Section: Introductionmentioning

confidence: 99%

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

Pradell¹,

Girbau²,

Ribó³

et al. 2018

MEMS Sensors - Design and Application

Self Cite

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Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconfigurable microwave and millimeter (mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch configurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, confirming the expected performances. Using an integrated RF-MEMS surface micromachining process, high-performance multimodal reconfigurable circuits, such as phase switches and filters, are developed with the proposed switch configurations. The design and optimization of these circuits are discussed and the simulated results compared to measurements.

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Hybrid continuous inverse class‐F high‐efficiency power amplifier based on phase shift analysis

Song

2022

Micro & Optical Tech Letters

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In this paper, a hybrid continuous inverse class-F high-efficiency power amplifier based on phase shift analysis is proposed. A broadband and highefficiency microwave power amplifier are designed by adopting load pull, source pull technique, and low-pass filter matching structure. The measured results show that the drain efficiency ranges from 67.5% to 77.8%, the saturated output power ranges from 40.2 to 42.4 dBm, and the saturated power gain ranges from 10.2 to 12.4 dB in the working frequency band from 2 to 3 GHz.The power amplifier proposed in this paper fits the current broadband microwave communication technology and plays an important role in the transmission of high data flow signals by wireless transmitters.

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RF-MEMS Uniplanar 180$^{\circ}$ Phase Switch Based on a Multimodal Air-Bridged CPW Cross

Cited by 13 publications

References 13 publications

MEMS Sensors - Design and Application

MEMS Sensors - Design and Application

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

Hybrid continuous inverse class‐F high‐efficiency power amplifier based on phase shift analysis

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