RF sputtered amorphous chalcogenide thin films for surface enhanced infrared absorption spectroscopy

Abstract

Abstract:The primary objective of this study is the development of transparent thin film materials in the IR enabling strong infrared absorption of organic compounds in the vicinity of metal nanoparticles by the surface plasmon effect. For developing these optical micro-sensors, heterostructures combining gold nanoparticles and chalcogenide planar waveguides are fabricated and adequately characterized. Single As 2 S 3 and Ge 25 Sb 10 Se 65 amorphous chalcogenide thin films are prepared by radiofrequency magnetron sputtering. For the fabrication of gold nanoparticles on a chalcogenide planar waveguide, direct current sputtering is employed. Fabricated single layers or hetero-structures are characterized using various techniques to investigate the influence of deposition parameters. The nanoparticles of gold are functionalized by a self-assembled monolayer of 4-nitrothiophenol. Finally, the surface enhanced infrared absorption spectra of 4-nitrothiophenol self-assembled on fabricated Au/Ge-Sb-Se thin films hetero-structures are measured and analyzed. This optical component presents a ~24 enhancement factor for the detection of NO 2 symmetric stretching vibration band of 4-nitrothiophenol at 1336 cm −1 . 232-239 (1999). 19. L. Tichý, H. Ticha, P. Nagels, R. Callaerts, R. Mertens, and M. Vlcek, "Optical properties of amorphous As-Se and Ge-As-Se thin films," Mater. Lett. 39(2), 122-128 (1999). 20. J. Charrier, M. L. Anne, H. Lhermite, V. Nazabal, J. P. Guin, F. Charpentier, T. Jouan, F. Henrio, D. Bosc, and J. L. Adam, "Sulphide GaxGe25-xSb10S65(x=0,5) sputtered films: Fabrication and optical characterizations of planar and rib optical waveguides," J. Appl.

Amorphous Ge‐Sb‐Se thin films fabricated by co‐sputtering: Properties and photosensitivity

“…Although the Ge‐As‐Se system is particularly attractive due to its greater glass‐forming region compared to Ge‐Sb‐Se system, the introduction of antimony provides higher polarizability increasing (non)linear refractive index and reduction in photosensitivity, representing an interesting option for nonlinear optics . Last but not least, improved shaping ability of Ge‐Sb‐Se glasses allows fabrication of fibers or thin films, which are of high importance considering optical sensor development, for instance . This is why study of thin films of ternary Ge‐Sb‐Se system have already attracted the attention of many authors …”

An Antimony Selenide Molecular Ink for Flexible Broadband Photodetectors

“…These films have typically been prepared via sophisticated deposition techniques such as catalyst-assisted chemical vapor deposition, [35] sputtering, [36] thermal evaporation [24,37] and molecular beam epitaxy [38] that require energy-intensive, high vacuum deposition conditions not amenable to high-throughput mass production.…”

Numerical investigation of tunable Fano-based optical bistability in coupled nonlinear gratings

“…In particular, each grating having the As 2 S 3 thin film with thickness of 220 nm is deposited on a glass substrates using RF/DC sputtering techniques [32]. The proposed coupled grating structures can be fabricated as the following procedures: (i) two single gratings can be fabricated first using electron-beam (e-beam) lithography and inductively coupled plasma etching (ICP) techniques.…”