Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and
DOI: 10.1109/wcpec.1994.519820
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Rf sputtered CdS/CdTe solar cells: effects of magnetic field, RF power, target morphology, and substrate temperature

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“…For the radio-frequency (rf ) planar magnetron sputtering, the sputtering process is controlled by the use of magnetic field so that a strong dependence of the film quality on the magnetic field structure is obtained [8]. The rf planar magnetron sputtering was implemented in our laboratory.…”
Section: 23mentioning
confidence: 99%
“…For the radio-frequency (rf ) planar magnetron sputtering, the sputtering process is controlled by the use of magnetic field so that a strong dependence of the film quality on the magnetic field structure is obtained [8]. The rf planar magnetron sputtering was implemented in our laboratory.…”
Section: 23mentioning
confidence: 99%