Rf Sputtering of Composite Fluorocarbon/ZnO Films and their Basic Properties

Abstract

Composite fluorocarbon/ZnO films were deposited by R.F. sputtering using polytetrafluoroethylene (PTFE) and Zn target on polyethylene terephthalate (PET) substrate. Argon was used as the working gas and oxygen as reacting gas. The obtained films were characterized by AFM, UV-visible spectrophotometer, XPS and static contact angle measurements. The composite films are islands-structure composed of nanometer particles. Surface of the islands is not flat. The static contact angle of water is larger than 90°, possessing excellent hydrophobicity. The composite films exhibit multi-enhanced ultraviolet absorption due to π-π-conjugated molecular structure, surface morphology and nano-sized ZnO absorbing effect.