2018
DOI: 10.1063/1.5012133
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RHEED oscillations in spinel ferrite epitaxial films grown by conventional planar magnetron sputtering

Abstract: Real-time in situ reflection high energy electron diffraction (RHEED) observations of Fe3O4, γ-Fe2O3, and (Co,Fe)3O4 films on MgO(001) substrates grown by a conventional planar magnetron sputtering was studied. The change in periodical intensity of the specular reflection spot in the RHEED images of three different spinel ferrite compounds grown by two different sputtering systems was examined. The oscillation period was found to correspond to the 1/4 unit cell of each spinel ferrite, similar to that observed … Show more

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Cited by 5 publications
(2 citation statements)
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“…Such a subunit cell growth is rare. It had until now been observed only for the growth of other complex cells, such as those of the spinel [28] or garnet [29] phases of iron oxides.…”
Section: Resultsmentioning
confidence: 99%
“…Such a subunit cell growth is rare. It had until now been observed only for the growth of other complex cells, such as those of the spinel [28] or garnet [29] phases of iron oxides.…”
Section: Resultsmentioning
confidence: 99%
“…Reflection high-energy electron diffraction is commonly used for monitoring the structure formation during molecular beam epitaxy. However, the method is only compatible with sputter deposition processes when using differential pumping, which affects the growth conditions significantly. X-ray methods do not suffer from this limitation, and are therefore well established for monitoring industrially relevant sputter deposition processes. We have combined real-time synchrotron experiments during magnetron sputter deposition and annealing of Pd/amorphous germanium (a-Ge) bilayers.…”
Section: Introductionmentioning
confidence: 99%