2009
DOI: 10.1016/j.optmat.2009.03.018
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Rib waveguides based on Zn-substituted LiNbO3 films grown by liquid phase epitaxy

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Cited by 20 publications
(8 citation statements)
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“…Optical waveguides comprised of hetero-materials efficiently confine propagating light because of large difference in refractive indices between the film and the substrate [13]. Therefore, LiNbO3s have been grown by several techniques including liquid-phase epitaxy [14], Ion Beam Sputtering [15], RF magnetron sputtering [16], molecular beam epitaxy [17], metalorganic chemical vapor deposition [18], pulsed-laser deposition (PLD) [19], thermal plasma spray chemical vapor deposition [20], electron-cyclotron-resonance (ECR) plasma sputtering [21], electron beam irradiation [22] and pulsed laser ablation (PLA) [23].…”
Section: Introductionmentioning
confidence: 99%
“…Optical waveguides comprised of hetero-materials efficiently confine propagating light because of large difference in refractive indices between the film and the substrate [13]. Therefore, LiNbO3s have been grown by several techniques including liquid-phase epitaxy [14], Ion Beam Sputtering [15], RF magnetron sputtering [16], molecular beam epitaxy [17], metalorganic chemical vapor deposition [18], pulsed-laser deposition (PLD) [19], thermal plasma spray chemical vapor deposition [20], electron-cyclotron-resonance (ECR) plasma sputtering [21], electron beam irradiation [22] and pulsed laser ablation (PLA) [23].…”
Section: Introductionmentioning
confidence: 99%
“…As an alternative to ion in‐diffusion 12, Zn‐substituted thin films can be epitaxially grown on pure x ‐cut substrate 14 using the liquid‐phase epitaxy (LPE) technique. Such films can be grown with an extraordinary optical quality 15, 16. In addition, both refractive indices, n e and n o , can be adapted, thus enabling planar dielectric waveguiding.…”
Section: Introductionmentioning
confidence: 99%
“…Among several methods for fabrication of thin films, e.g., sputtering [7], liquid phase epitaxy [8], sol-gel method [9], etc, the PLD method has advantages over others in the following points, (1) materials stoichiometry can be maintained, (2) oxygen-deficiencies can be controlled by adjustment of atmospheric gas pressure and (3) film's thickness is simply proportional to the number of the pulses radiated onto the targets [10].…”
Section: A Fabrication Of the Thin Films By The Pld Methodsmentioning
confidence: 99%