Rigorous reflectance performance analysis of Si3N4 self-suspended subwavelength gratings

Ye, Jia Sheng; Kanamori, Yoshiaki; Hu, Fangren; Hane, Kazuhiro

doi:10.1016/j.optcom.2006.09.028

Cited by 13 publications

(4 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The grating period is smaller than the resonant wavelength and does not generate higher‐order diffracted waves. GMRG, which consists of a material without absorption loss, theoretically has 100% reflectance at the resonant wavelength [60–93]. For incident light other than the resonant wavelength, the GMRG behaves as a uniform medium with an effective refractive index according to the characteristics of SWG.…”

Section: Application Of Nanophotonic Optical Filtersmentioning

confidence: 99%

High‐Efficiency Optical Filters Based on Nanophotonics

Kanamori

2021

IEEJ Transactions Elec Engng

Self Cite

View full text Add to dashboard Cite

Nanophotonic structures are artificial optical substances composed of structures smaller than incident light wavelengths. For example, it can artificially create a unique refractive index that is not found in substances in the natural world. That is, by designing the shape of the nanophotonic structure, an optical filter device that exhibits an optical response on demand can be realized. Also, we can realize applied devices with useful functions that cannot be realized by substances existing in nature, such as antireflective surfaces with 0% reflectance, wavelength-selective filters with 100% reflectance at specific wavelengths, and filters that shift the resonant wavelength in response to changes in the ambient refractive index. There can be applications to highbrightness light-emitting elements, high-efficiency power generation elements, color filters for full-color high-resolution cameras, miniature spectroscopic systems, high-efficiency biosensors, and so on. In the future, the development of further applications with this technology is widely expected in the fields of information, energy and global environment, and medical care and welfare. This paper describes high-efficiency optical filters based on nanophotonic technologies.

show abstract

Section: Application Of Nanophotonic Optical Filtersmentioning

confidence: 99%

High‐Efficiency Optical Filters Based on Nanophotonics

Kanamori

2021

IEEJ Transactions Elec Engng

Self Cite

View full text Add to dashboard Cite

show abstract

“…Different from the conventional GMR sensor, the label-free optical bio-sensor we propose does not need the additional bio-selective layer covered on the sensor [18], the structure we use is a typically single layer SSG that is widely used in micro-electromechanical system (MEMS) devices for applications in areas such as wavelength selection, and optical filtering [19][20][21]. Owing to the absence of a substrate, the SSG can be easily tuned using the MEMS actuator [22].…”

Section: Introductionmentioning

confidence: 99%

Ultra-sensitive bio-sensor based on GMR in self-suspended-membrane-type germanium grating

Zhang

2012

J. Opt.

View full text Add to dashboard Cite

In this paper, an ultra-sensitive bio-sensor based on the GMR effect in self-suspended-membrane-type gratings (SSGs) is proposed using multilayer plane waveguide theory. It is demonstrated from our calculations that the sensitivity of our bio-sensor is near the theoretical limit compared with a conventional GMR sensor. Based on the normalized eigenfunction of a single-layer homogeneous grating, the resonance curves with respect to different refractive indices of surrounding media are calculated, which confirm the estimated sensitivity. In addition, we design a highly sensitive bio-sensor in the near- and mid-IR wavelength region for liquid and gas detection respectively, the sensor can deliver a resolution over 1 × 10−5 in the near-IR region in a large refractive index (1.3–1.7) range and provide better than 1 × 10−6 in the mid-IR region, which is enough for various bio-material detections. Therefore, the bio-sensor we proposed is one or two orders more sensitive than conventional GMR sensors.

show abstract

“…Instead, the incident light is coupled into in-plane guided resonances. A variety of different structures based on dielectric films with periodically modulated refractive index have been demonstrated that exploit this effect, including 1-D subwavelength gratings [5] and 2-D photonic crystal slabs [6], as well as guided-mode resonant gratings (GMRG) [7,8].…”

Section: Introductionmentioning

confidence: 99%

Micromechanical and microfluidic devices incorporating resonant metallic gratings fabricated using nanoimprint lithography

2008

View full text Add to dashboard Cite

Optical filters based on resonant gratings have spectral characteristics that are lithographically defined. Nanoimprint lithography is a relatively new method for producing large area gratings with sub-micron features. Computational modeling using rigorous coupled-wave analysis allows gratings to be designed to yield sharp reflectance maxima and minima. Combining these gratings with microfluidic channels and micromechanical actuators produced using micro electromechanical systems (MEMS) technology forms the basis for producing tunable filters and other wavelength selective elements. These devices achieve tunable optical characteristics by varying the index of refraction on the surface of the grating. Coating the grating surface with water creates a 33% change in the resonant wavelength whereas bringing a grating into contact with a quartz surface shifts the resonant wavelength from 558 nm to 879 nm, a fractional change of 58%. The reflectivity at a single wavelength can be varied by approximately a factor of three. Future applications of these devices may include tunable filters or optical modulators.

show abstract

Rigorous reflectance performance analysis of Si3N4 self-suspended subwavelength gratings

Cited by 13 publications

References 28 publications

High‐Efficiency Optical Filters Based on Nanophotonics

High‐Efficiency Optical Filters Based on Nanophotonics

Ultra-sensitive bio-sensor based on GMR in self-suspended-membrane-type germanium grating

Micromechanical and microfluidic devices incorporating resonant metallic gratings fabricated using nanoimprint lithography

Contact Info

Product

Resources

About