Ripple rotation, pattern transitions, and long range ordered dots on silicon by ion beam erosion

Abstract

The importance of the ion incidence angle in self-organized pattern formation during low energy Xe+ ion beam erosion of silicon is elaborated. By a small step variation of the ion incidence angle, a variety of nanostructured patterns can develop. In this context, the angular distribution of ions within the ion beam is explored as an additional parameter controlling the evolution of the surface topography. Due to a controlled variation of these two parameters, hitherto unknown phenomena are found: (i) formation of rotated ripples, (ii) continuous transitions between patterns, and (iii) long range square ordered dot pattern.

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

“…In other cases, nanodot patterns were indeed produced [98], remarkably even with enhanced medium-range ordering [99]. Also, the possibility to tune this highly-ordered patterns between hexagonal and square arrays was reported [100]. It is worth mentioning that, at some stage of the research, issues on the ion gun characteristics and operation (such as broadness and beam divergence) were considered as rather relevant to explain the already diverse experimental findings [101].…”

Molecular dynamics of single-particle impacts predicts phase diagrams for large scale pattern formation

“…Hence, it is important to be able to predict the expected behaviour within a given environment. Unfortunately, precisely which physical effects cause observed transitions between different regimes 9,10 has remained a matter of speculation 11 .…”

Producing virtually defect-free nanoscale ripples by ion bombardment of rocked solid surfaces

“…A longstanding issue in this field, however, is the high density of defects in the patterns that typically form. This problem is the primary obstacle that prevents widespread use of ion bombardment as a nanofabrication tool, and much work has been done toward the goal of producing very well ordered patterns [2][3][4][5][6][7][8][9]. To date, no experiment has yielded highly ordered patterns on an elemental sample using a noble gas ion beam.…”