1998
DOI: 10.1103/physrevlett.81.2735
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Ripple Wave Vector Rotation in Anisotropic Crystal Sputtering

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Cited by 183 publications
(125 citation statements)
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“…where N e = [(2π) 3/2 σ z (6σ (16) to Sigmund's distribution (1): decay here is slower [exponential as compared to Gaussian, thus the subscripts in (16)] in the plane perpendicular to the ion trajectory, and energy deposition is null along the ion trajectory itself. On the other hand, distribution (16) is unphysical.…”
Section: Modified Energy Distribution Functionsmentioning
confidence: 99%
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“…where N e = [(2π) 3/2 σ z (6σ (16) to Sigmund's distribution (1): decay here is slower [exponential as compared to Gaussian, thus the subscripts in (16)] in the plane perpendicular to the ion trajectory, and energy deposition is null along the ion trajectory itself. On the other hand, distribution (16) is unphysical.…”
Section: Modified Energy Distribution Functionsmentioning
confidence: 99%
“…since c < 0 leads to negative probabilities for small ρ values. For this reason, and in order to facilitate analytical results [unavailable for (16) in the physical case of a two dimensional target, see below], we will also consider the following modified Gaussian (thus the subscripts) distribution…”
Section: Modified Energy Distribution Functionsmentioning
confidence: 99%
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