2005
DOI: 10.1007/s11803-005-0032-9
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Road vehicle-induced vibration control of microelectronics facilities

Abstract: A hybrid control platform is investigated in this paper to mitigate microvibrations to a group of vibrationsensitive equipment installed in a microelectronics facility subject to nearby road vehicle-induced horizontal and vertical ground motions. The hybrid control platform, on which microelectronics equipment is installed, is mounted on a building floor through a series of passive mounts and controlled by hydraulic actuators in both horizontal and vertical directions. The control platform is an elastic body w… Show more

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Cited by 6 publications
(3 citation statements)
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“…In order to improve the traditional design method, seismic isolation design method is carried out, which relies on the ductility of the isolation devices to absorb or reduce the earthquake energy transmitted to the structure. Hence, passive control technology [1][2], active control technology [3] and semi-active control technology [4][5][6][7] are commonly used in high-way bridges currently. These technologies not only improve the performance but also decrease the cost of the construction.…”
Section: Introductionmentioning
confidence: 99%
“…In order to improve the traditional design method, seismic isolation design method is carried out, which relies on the ductility of the isolation devices to absorb or reduce the earthquake energy transmitted to the structure. Hence, passive control technology [1][2], active control technology [3] and semi-active control technology [4][5][6][7] are commonly used in high-way bridges currently. These technologies not only improve the performance but also decrease the cost of the construction.…”
Section: Introductionmentioning
confidence: 99%
“…The allowable disturbances required for high-tech facilities are beyond what are normally required for typical engineering structures, for example, disturbances of vibrations, airborne particles, etc. In particular, manmade vibrations caused by human activities (i.e., road and railway traffic, construction activities) should be controlled at low levels over long periods of time for adjacent high-tech facilities in which vibration-sensitive equipment and instruments are housed (Guo et al, 2005; Gordon, 1992; Amick and Gendreau, 2000). Achieving vibration stability of a high-tech facility requires effective measures for reducing unwanted vibrations.…”
Section: Introductionmentioning
confidence: 99%
“…Actuators which use shape memory effects (SME) of SMAs are capable of replacing complex and heavyweight driving motors with simple and lightweight components, and of generating the driving forces for control of active response of structures. Moreover, the SMA dissipaters apply the super-elasticity effect (SE) of the SMAs to improve the damping and vibration suppression capacity of structures [4][5][6][7][8] . In response to super-elastic characteristics of the SMA, the authors assembled SMA passive cable at the diagonal of each layer of steel frame structure.…”
Section: Introductionmentioning
confidence: 99%