2022
DOI: 10.1016/j.sna.2022.113878
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Robust and fast response solar-blind UV photodetectors based on the transferable 4H-SiC free-standing nanowire arrays

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Cited by 15 publications
(1 citation statement)
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“…Furthermore, the SiC surface can be thermally oxidized to produce high-quality SiO 2 layers, which effectively protect the device, resulting in reduced dark current and improved detection rates. Currently, various types of SiC PDs with different structures have been developed to meet different demands, including p-n, p-i-n, avalanche PDs, Schottky barrier, and metal-semiconductor-metal (MSM) [9][10][11][12][13][14][15]. Among these, MSM PDs are extensively studied due to their low parasitic capacitance, high operation speed, and ease of integration with field-effect transistors or integrated circuits on a single chip.…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, the SiC surface can be thermally oxidized to produce high-quality SiO 2 layers, which effectively protect the device, resulting in reduced dark current and improved detection rates. Currently, various types of SiC PDs with different structures have been developed to meet different demands, including p-n, p-i-n, avalanche PDs, Schottky barrier, and metal-semiconductor-metal (MSM) [9][10][11][12][13][14][15]. Among these, MSM PDs are extensively studied due to their low parasitic capacitance, high operation speed, and ease of integration with field-effect transistors or integrated circuits on a single chip.…”
Section: Introductionmentioning
confidence: 99%