Robust control strategies of stick-slip type actuators for fast and accurate nanopositioning operations in scanning mode

Oubellil, Raouia; Voda, Alina; Régnier, Stéphane

doi:10.1109/med.2015.7158820

Cited by 10 publications

(4 citation statements)

References 16 publications

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“…This device has been modeled in [12]. Several control strategies dedicated for PSS type actuators that are partially used in this paper have been proposed in previous works [20][22] [23].…”

Section: Methodsmentioning

confidence: 99%

Atomic Force Microscope Vertical Feedback Control Strategy for Semi-Automated Long-Range Probe Landing

Leiro

Daher

Régnier

2022

2022 IEEE 61st Conference on Decision and Control (CDC)

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Traditional Atomic Force Microscopes (AFM) allow a short range displacement of the AFM probe, on the order of several tens of micrometers. When used inside an Electron Microscope (EM), the probe must be able to move on a millimeter scale with nanometer resolution. This is essential for the probe to reach any region of interest on a sample observed by an EM. In this paper, we address a challenging issue related to semi-automated long-range landing of an AFM probe on a sample. The probe is mounted on a piezoelectric inertial actuator. It is initially several millimeters away from the sample and must be safely landed to a distance on the order of hundred of nanometers (intermittent contact region). The control strategy is divided into three steps: (i) long-range velocity control using a stepping control, (ii) short and fine position control using a mixed stepping/scanning control, and (iii) position/force control using a scanning control. While traditional manual landing methods take a tremendous amount of time to complete the procedure, the proposed semi-automated method enables a safe long-range landing in less than 3 minutes. More generally, this is the first experimental demonstration in the literature of such a capability in AFM.

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“…This device has been modeled in [12]. Several control strategies dedicated for PSS type actuators that are partially used in this paper have been proposed in previous works [20][22] [23].…”

Section: Methodsmentioning

confidence: 99%

Atomic Force Microscope Vertical Feedback Control Strategy for Semi-Automated Long-Range Probe Landing

Leiro

Daher

Régnier

2022

2022 IEEE 61st Conference on Decision and Control (CDC)

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“…A 2-DOF H∞ control scheme is designed to provide robust performance for the positioning of the nanorobot system. The fast and accurate positioning of the piezoelectric stick-slip actuator is realized [51].…”

Section: Intelligent Control Of Piezoelectric Stick-slip Actuatorsmentioning

confidence: 99%

A Review of Modeling and Control of Piezoelectric Stick-Slip Actuators

Zhang¹,

Fan²,

Dong³

et al. 2022

Piezoelectric Actuators

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Piezoelectric stick-slip actuators with high precision, large actuating force, and high displacement resolution are currently widely used in the field of high-precision micro-nano processing and manufacturing. However, the non-negligible, non-linear factors and complexity of their characteristics make its modeling and control quite difficult and affect the positioning accuracy and stability of the system. To obtain higher positioning accuracy and efficiency, modeling and control of piezoelectric stick-slip actuators are meaningful and necessary. Firstly, according to the working principle of stick-slip drive, this paper introduces the sub-models with different characteristics, such as hysteresis, dynamics, and friction, and presents the comprehensive modeling representative piezoelectric stick-slip actuators. Next, the control approaches suggested by different scholars are also summarized. Appropriate control strategies are adopted to reduce its tracking error and position error in response to the influence of various factors. Lastly, future research and application prospects in modeling and control are pointed out.

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“…In Fig . 7, the ratio of b 0x on a 0x is an input disturbance [35]. The H ∞ control strategy, developed in the following section, is based on this model.…”

Section: Multi-linear Approximation Of Hysteresismentioning

confidence: 99%

Mixed stepping/scanning mode control of stick-slip SEM-integrated nano-robotic systems

Oubellil

Voda

Boudaoud

et al. 2019

Sensors and Actuators A: Physical

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The ability to do dexterous automated and semi-automated tasks at the micro-and nano-meter scales inside a Scanning Electron Microscope (SEM) is a critical issue for nanotechnologies. SEM-integrated nano-robotic systems with several Degrees Of Freedom (DOF) and one or several end-effectors have therefore widely emerged in research laboratories and industry. The Piezoelectric Stick-Slip (PSS) is one of the best actuation principle for SEM-integrated nano-robotic systems as it has two operating modes, namely a coarse positioning mode with long travel range, and a fine positioning mode with a resolution of the order of the nanometer. The main contribution of this paper is the design of a switch control strategy to deal efficiently and in a transparent way from the user's point of view, with the transition between the coarse and the fine operating modes of PSS actuators. The aim is to be able to perform positioning tasks with a millimeter displacement range and a nanometer resolution without worrying about the mode of operation of the actuator. The coarse mode and the fine mode are respectively controlled with a frequency/voltage proportional control and a H ∞ control. The switch control is based on an internal model of the actuator. Experimental results show the effectiveness of the new mixed coarse/fine mode control strategy to satisfy closed-loop stability and bumpless specifications at the switching time. For the best knowledge of the authors, this result is the first demonstration of such a control capability for PSS actuators.

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Robust control strategies of stick-slip type actuators for fast and accurate nanopositioning operations in scanning mode

Cited by 10 publications

References 16 publications

Atomic Force Microscope Vertical Feedback Control Strategy for Semi-Automated Long-Range Probe Landing

Atomic Force Microscope Vertical Feedback Control Strategy for Semi-Automated Long-Range Probe Landing

A Review of Modeling and Control of Piezoelectric Stick-Slip Actuators

Mixed stepping/scanning mode control of stick-slip SEM-integrated nano-robotic systems

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