Robust dynamic modeling and control of dual-stage actuators

Callafon, Raymond A. de; Nagamune, Ryozo; Horowitz, Roberto

doi:10.1109/tmag.2005.861738

Cited by 46 publications

(16 citation statements)

References 14 publications

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“…However, there is also another, more subtle, aspect of the design tradeoff. Previous ad hoc model identification had shown that three uncertain parameters could capture the spread of the parameter values to reasonable accuracy [4]. Fig.…”

Section: ) Final Characterizationmentioning

confidence: 94%

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Parametric Uncertainty Identification and Model Reduction for Robust H2 Synthesis for Track-Following in Dual-Stage Hard Disk Drives

Conway

Felix

Horowitz

2007

2007 American Control Conference

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This paper presents a systematic, semi-automated method for identifying parameters and parametric uncertainty for a set of dual-stage hard disk drives. A modal analysis technique is selected to extract parameters from a batch of frequency response data. In order to avoid redundancy in modal parameters, a method of data fusion is incorporated into the modal analysis to find common parameters for multiple frequency response functions. Next, a model truncation methodology is presented as an alternative way to eliminate redundant parameters from a multiple-input-multiple-output system model. In both model reduction methods, optimization algorithms are employed to minimize the error associated with the reduced order model. Finally, convex optimization and singular value decomposition are employed to obtain a low-order, minimally conservative approximation of uncertain parameters. The result is a reduced order state space model with parametric uncertainty to be used in robust H2 control synthesis for a track-following hard disk drive servo.

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Section: ) Final Characterizationmentioning

confidence: 94%

“…Fig. 1 shows the experimental frequency response data for a batch of 15 dual-input, single-output hard disk drive plants obtained from [4]. The secondary input is piezoelectric (PZT) actuation of the suspension.…”

Section: Introductionmentioning

confidence: 99%

Parametric Uncertainty Identification and Model Reduction for Robust H2 Synthesis for Track-Following in Dual-Stage Hard Disk Drives

Conway

Felix

Horowitz

2007

2007 American Control Conference

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show abstract

“…Four typical dual stroke actuator control structures are presented for the rotary dual servo control system in [3]. Among these control structures, parallel structure and dual feedback structure are always used for hard disk drives [4][5] and linear long stroke precision stages [6] , which employ piezoelectric actuators as the micro actuators. In this case, the control methods can be designed independently when the relative displacement limit between two actuators during motion is a principal problem for the control system.…”

Section: Introductionmentioning

confidence: 99%

Iterative learning control for dual stroke actuator systems

Jiang

Wang

et al. 2013

Eighth International Symposium on Precision Engineering Measurement and Instrumentation

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This paper presents a dual iterative learning control strategy for a dual stroke actuator system in the lithography scanner. The motion control strategy is employed, in which the trajectory of a short stroke stage is followed by one of a long stroke stage. A short stroke stage is used for improving the system response performance while a long stroke stage is introduced for the purpose of long motion stroke of the system. Combining the dynamic model of the system, the coupling effects between two actuators are analyzed, and the system model is simplified. This model is used for the design of a dual iterative learning control strategy and decoupling controllers. As a result, the heavy proportion of the recurrent coupling force on the long stroke stage is eliminated by the decoupling feedforward action from the output of the short stroke stage in the scanning process. The rest of the coupling force is removed by the first iterative learning control between two subsystems. The impact on the short stroke stage from the long stroke stage is weakened, and the short stroke stage is then designed independently by the two degree of freedom control strategy combining feedback control with the second iterative learning control. The convergence of the iterative learning control system is shown, and the effectiveness of the combined method is verified by a simulated wafer stage.

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“…The torque maximization is achieved via the application of genetic algorithm (GA) (Im et al 2003;Grefenstette 1986) for finding optimum design parameters of VCM components and various sizes. After the goal of optimization is accomplished, the system dynamic equations are next derived based on the Lagrange's method (O'Reilly 2007;De Callafon et al 2006). The equations of motion (EOM) are derived by considering the variations of the magnetic force, moments of inertia and the rotation angles of the lens module changes, the complicated dynamics of the OIS can be deciphered via equations.…”

Section: Introductionmentioning

confidence: 99%

A new two-DOF rotational optical image stabilizer

et al. 2011

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This work proposes design, optimization and validation of a new two degree-of-freedom (DOF) rotational optical image stabilizer (OIS) that is suitable for installing into a mobile-phone-camera. This OIS differs from the previous designs since it stabilizes the lens holder directly by two-DOF translational mechanisms that are actuated by voice coil motors. The work can be divided into three main parts: (1) designs of mechanism and genetic algorithm (GA) optimization of magnetic field, (2) establishments of the dynamic model and equation of motions (EOM) of a dual-axis rotational structure, and (3) realizations of a sliding mode control (SMC) controller with fine performance. The dynamic of the dual-axis rotational OIS system has been analyzed and the EOM has been derived. Based on the Lagrange's method, the motions of the OIS have been modeled through considering kinetic energy and electromagnetic torques. In the last part, the theory of SMC is applied, and the associated simulations are conducted. Based on the simulation results, the SMC controller is forged with the assistances from MATLAB pre-simulation and tested by a microprocessor module. After a series of experiments and verifications, the prototype of the novel OIS is finally accomplished with satisfactory performance of vibration reduction.

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Robust dynamic modeling and control of dual-stage actuators

Cited by 46 publications

References 14 publications

Parametric Uncertainty Identification and Model Reduction for Robust H2 Synthesis for Track-Following in Dual-Stage Hard Disk Drives

Parametric Uncertainty Identification and Model Reduction for Robust H2 Synthesis for Track-Following in Dual-Stage Hard Disk Drives

Iterative learning control for dual stroke actuator systems

A new two-DOF rotational optical image stabilizer

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