Robust Optimization of a MEMS Accelerometer Considering Temperature Variations

Liu, Guangjun; Feng, Yang; Bao, Xiaofan; Jiang, Tao

doi:10.3390/s150306342

Cited by 28 publications

(13 citation statements)

References 30 publications

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“…In fact, they are being increasingly used in monitoring applications also in association with open-source controlling platforms such as Arduino ® [13,14,15,16]. Despite advantages over traditional high precision electromechanical sensor such as smaller size and power consumption and sufficient resolution for many monitoring problems, IMU MEMS sensors have the disadvantage to be very sensible to temperature variation [17,18]. This makes IMU MEMS not readily suitable for mid-to-high precision monitoring applications in uncontrolled environment.…”

Section: Introductionmentioning

confidence: 99%

A Low-Cost Chamber Prototype for Automatic Thermal Analysis of MEMS IMU Sensors in Tilt Measurements Perspective

Ruzza

Guerriero

Revellino

et al. 2019

Sensors

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In this work, a low-cost, open-source and replicable system prototype for thermal analysis of low-cost Micro Electro-Mechanical Systems (MEMS) Inertial Measurement Unit (IMU) sensors in tilt measurement perspective is presented and tested. The system is formed of a 3D printed frame, a thermal cell consisting in a Peltier element mounted over a heat sink, and a control and power system. The frame is designed to allow the independent biaxial tilting of the thermal cell through two servomotors. The control board is formed by an Arduino® and a self-made board including a power drive for controlling the thermal unit and servomotors. We tested the chamber analyzing the behavior of multiple MEMS IMU onboard accelerometers suitable for measuring tilt. Our results underline the variability of the thermal behavior of the sensors, also for different sensor boards of the same model, and consequently the need for the adoption of a thermal compensation strategy based on thermal analysis results. These data suggesting the need for the analysis of the thermal behavior of MEMS-based sensors, indicate the potential of our system in making low-cost sensors suitable in medium-to-high precision monitoring applications.

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Section: Introductionmentioning

confidence: 99%

A Low-Cost Chamber Prototype for Automatic Thermal Analysis of MEMS IMU Sensors in Tilt Measurements Perspective

Ruzza

Guerriero

Revellino

et al. 2019

Sensors

View full text Add to dashboard Cite

show abstract

“…This approach can also cause residual stresses and other unwanted effects in the semiconductor though, and needs further research before becoming a viable option. It is also possible to adapt the design dimensions of a MEMS device by means of a simulation optimization loop so that a flat capacitance response with temperature is generated as used by Liu et al [34], but a significant amount of design and optimization effort is needed, and further simulation work is needed to evaluate the feasibility of this approach for the proposed MEMS CMG layout.…”

Section: Discussion Of Thermal Effectsmentioning

confidence: 99%

Study for femto satellites using micro Control Moment Gyroscope

Post

Bauer

et al. 2016

2016 IEEE Aerospace Conference

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Abstract-Femto-satellites can be used for distributed space missions that can require hundreds to thousands of satellites for real time, distributed, multi-point networks to accomplish remote sensing and science objectives. While suitable sensors are available using micro-electro-mechanical system technology, most femto-satellite designs have no attitude control capability due to the power and size constraints on attitude control actuators. A novel femto-satellite design that uses a micro-electromechanical system Control Moment Gyroscope is studied in this paper. We focus on the principal design, modelling, and discussion of the proposed Control Moment Gyroscope while detailing a controllable femto-satellite design that can make use of attitude control for simple sensing missions.

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“…The status of the individual variables and constraints described in the various layers can indicate if execution of an operation is possible, or not. A typical example of using layers in computing the simultaneous changes due to multiple concurrently present physical changes is consideration of effects of temperature variations in a wide temperature range on the MEMS accelerometer, which need to be minimised in the process of optimisation (Liu et al 2015). Because of the temperature variations thermal deformation occurs, which has a negative effect on the output performance of the accelerometer (Wang, Li, and Rizos 2009).…”

Section: Formal Specification Of Operations Of Smfs For Computationmentioning

confidence: 99%

Towards a methodology of system manifestation features-based pre-embodiment design

Pourtalebi

Horváth

2016

Journal of Engineering Design

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The main assumption is that complicated systems, such as cyberphysical systems (CPSs), can be modelled by specific compositions of system manifestation features (SMFs). SMFs are regarded as architectural domains of a system having significance from an operational viewpoint. As system modelling entities, SMFs represent both physical and computing transformations of domains. Based on mereo-operandi theory (MOT), a computational framework for using SMFs in pre-embodiment design of CPSs is proposed. MOT offers a theoretical platform for concurrent modelling of architectural elements and their operations. The traditional 'application feature technology' has been generalised in order to provide a methodological basis. The computational formalisation captures state transitions and input/ output streams, in addition to spatiotemporal, physical and/or computational attributes of domains. Domain transformations are represented by flows of operation (FoOs) that consist of timesequenced and logically constrained sets of units of operations (UoOs), and processed by various computational methods as procedures. The domains of SMFs are aggregated into a feasible architecture, and their UoOs are combined into FoOs. An application case is used to explain the concepts and to demonstrate feasibility of the proposed approach. Further research will focus on implementation of an SMFs-based preembodiment design system and testing its feasibility and usability with designers of CPSs.

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Robust Optimization of a MEMS Accelerometer Considering Temperature Variations

Cited by 28 publications

References 30 publications

A Low-Cost Chamber Prototype for Automatic Thermal Analysis of MEMS IMU Sensors in Tilt Measurements Perspective

A Low-Cost Chamber Prototype for Automatic Thermal Analysis of MEMS IMU Sensors in Tilt Measurements Perspective

Study for femto satellites using micro Control Moment Gyroscope

Towards a methodology of system manifestation features-based pre-embodiment design

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