“…Different techniques have been used to evaluate the homogeneity of MoS 2 . The thickness of thick MoS 2 films has been estimated from transmission electron microscopy (TEM) images of out-of-plane cross sections. ,, However, a disadvantage of TEM is its limited inspection area. Local structure variations can also be inferred from Raman spectroscopy as the area of the E 1 2g and A 1g peaks (the typical fingerprints of MoS 2 ) depends, among other things, on the amount of the two-dimensional (2D) material synthetized. , However, the intensity of MoS 2 Raman peaks is also affected by other factors such as crystalline grain size and crystal orientation. ,,, In this context, spectroscopic ellipsometry (SE) is a powerful nondestructive technique that allows obtaining the thickness and optical properties of thin films based on the modeling of the polarization state of light reflected from the surface .…”