Blue-green to near-IR switching electroluminescence (EL) has been achieved in a metal-oxide-semiconductor light emitting device, where the dielectric has been replaced by a Si-rich silicon oxide/nitride bilayer structure. To form Si nanostructures, the layers were implanted with Si ions at high energy, resulting in a Si excess of 19%, and subsequently annealed at 1000°C. Transmission electron microscopy and EL studies allowed ascribing the blue-green emission to the Si nitride related defects and the near-IR band with the emission of the Si-nanoclusters embedded into the SiO 2 layer. Charge transport analysis is reported and allows for identifying the origin of this twowavelength switching effect. © 2011 Optical Society of America OCIS codes: 250.0250, 230.2090, 230.6080, 260.3800.Silicon-rich silicon oxide (SRSO) and silicon-rich silicon nitride (SRSN) have drawn great interest in the last decades as active dielectric matrices in optoelectronic devices [1][2][3][4]. Particularly, these materials have been used in the fabrication of low-cost light emitting devices compatible with the mainstream Si technology, They also provide a solution to the monolithic integration of electronic and optical technologies on the same Si chip. Different electroluminescence (EL) excitation mechanisms have been reported, such as hot electrons [5] and optically active defects [6] or field-effect EL using pulsed excitation [1]. The EL emission of the Si-nanocrystals (Si-ncs) embedded in SiO 2 is usually in the red-IR and shows a narrow shift capability depending on Si-nc size [1,3]. Regarding Si nitrides, luminescence in the bluegreen is also reported, ascribed either to Si nitride related defects or Si-ncs [4,7]. In addition, some strategies have been employed in order to extend the EL emission to different spectral region. For instance, defects created by dopants such as rare-earth ions can lead to light emission from UV to near-IR, depending on their specific energy level structure [8].In this Letter we report two-wavelength switching metal-nitride-oxide-semiconductor light emitting devices (MNOSLED) based on a SRSO/SRSN bilayer structure.The devices are similar to metal-oxide-semiconductor field-effect transistors with a 100 nm thick polycrystalline silicon layer used as an optically transparent gate electrode. Since its transmittance spectrum peaks at 470 nm and 760 nm [3], the final EL spectra of the devices are modulated accordingly. In order to combine light emission from different matrices, a SRSO/SRSN bilayer structure was designed ad hoc to form the insulator of the transistor. The Si excess in the SiO 2 and Si 3 N 4 layers was introduced by ion implantation. A subsequent annealing treatment at 1000°C during one hour was performed to recover the matrices and precipitate the Si-ncs. The implantation parameters (energy and dose) were chosen by stopping and range of ions in matter simulations to obtain a Si excess of 19%, attending to photoluminescence studies in previous works [7]. Energy filtered transmission electron micr...