2019
DOI: 10.1007/s11090-019-10005-w
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Role of Electron–Ion Dissociative Recombination in $$\hbox {CH}_{4}$$ Microwave Plasma on Basis of Simulations and Measurements of Electron Energy

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Cited by 4 publications
(3 citation statements)
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“…The changing absorbed power density is a likely explanation for this behavior. Alternatively, formation of carbon ions as main charge carrier may become important, which reduces charge recombination losses and consequently again the electron temperature and density [58]. The present diagnostic means do not allow to distinguish these effects unambiguously.…”
Section: Plasma Electron Propertiesmentioning
confidence: 82%
“…The changing absorbed power density is a likely explanation for this behavior. Alternatively, formation of carbon ions as main charge carrier may become important, which reduces charge recombination losses and consequently again the electron temperature and density [58]. The present diagnostic means do not allow to distinguish these effects unambiguously.…”
Section: Plasma Electron Propertiesmentioning
confidence: 82%
“…Despite this, the assumption of uniform power deposition and temperature in the discharge may result in significant errors in this calculation, plus there is the possibility of other reaction mechanisms that reduce the electron temperature [64]. These errors preclude definitive statements regarding energy transfer in the plasma, rather these observations provide additional evidence for determining the important heating mechanisms.…”
Section: Microwave Power Transfer and Dissipationmentioning
confidence: 98%
“…uniform plasma power deposition, a Maxwellian distribution of electron energy), propagation of relative large errors (e.g. uncertainty in plasma volume, uncertainty in cross sectional data-particularly for electronic excitation of CH 4 ), or the presence of other species besides CH 4 that may modify the plasma chemistry [64].…”
Section: Microwave Power Transfer and Dissipationmentioning
confidence: 99%