2008
DOI: 10.1088/0022-3727/41/24/245407
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Role of hydroxyl groups in the formation of defect configurations in silicon devices

Abstract: We use density functional theory to investigate five types of neutral hydroxyl group (-OH) defect within bulk Si, in terms of structural and electronic properties. We find that two out of these five defect configurations yield degenerate n-type direct current conductivity and intra-band gap levels that lie in the vicinities of both the valence and the conduction bands. For the other three defect configurations, the defect bands appear near the valence band maximum (VBM) only and the Fermi level lies close to t… Show more

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Cited by 2 publications
(5 citation statements)
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“…The minimum kinetic energy of neutrals, E α , has been considered a free parameter and adjusted, so that the simulation results match closely the experimental data. The obtained value is E α = 0.29 eV (27.98 kJ•mol −1 ), well within the expected order of magnitude [36]. This value also matches the expectation that desorption of oxygen atoms from chemisorbed sites only takes place when T nw reaches approximately 2000 K [28].…”
Section: Metastable Chemisorption Site Destructionsupporting
confidence: 87%
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“…The minimum kinetic energy of neutrals, E α , has been considered a free parameter and adjusted, so that the simulation results match closely the experimental data. The obtained value is E α = 0.29 eV (27.98 kJ•mol −1 ), well within the expected order of magnitude [36]. This value also matches the expectation that desorption of oxygen atoms from chemisorbed sites only takes place when T nw reaches approximately 2000 K [28].…”
Section: Metastable Chemisorption Site Destructionsupporting
confidence: 87%
“…We consider that the gas-phase particle needs a minimum kinetic energy E α to change the energy value of the chemisorption site. We expect E α to be of the order of the difference between defect energy levels for different configurations of silica lattice with OH radicals as defects, ∼0.3 eV [36]. For these low energies, we expect the flux of neutral particles from the gas phase to be much higher than the flux of O 2 ions [15].…”
Section: Metastable Chemisorption Site Destructionmentioning
confidence: 94%
“…From the literature it is clear that the conduction of oxides increases after formation of -OH groups on the surface and it forms donor states close to the conduction band. 18,23,24,41 The optical band gaps of samples A and B are found to be around 4.45 and 4.25 eV, respectively (Fig. 5).…”
Section: Photoluminescence Of -Oh Group Related Defectsmentioning
confidence: 94%
“…Similarly, DFT calculations of -OH groups attached to Si surfaces revealed formation of donor defect states due to certain kind of Si-OH. 24 Based on various factors (e.g., season, temperature, location) moisture in atmosphere can vary from ca. 0.1 up to 4 vol%, which notably changes the electronic properties of the sensors and influences their sensitivity.…”
Section: Introductionmentioning
confidence: 99%
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