2013
DOI: 10.15407/ujpe58.09.0872
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Role of Mechanical Stresses at Ion Implantation of CdHgTe Solid Solutions

Abstract: The properties of n-CdxHg1−xTe/CdZnTe (x ≈ 0.223) structures implanted with B + and Ag + ions with an energy of 100 keV to a dose of 3 × 10 13 cm −2 are studied. The software package TRIM_2008 was applied to simulate the ion implantation process. The surface morphology of heterostructures and their optical, mechanical and electrical properties are studied. It is found that the ion irradiation of specimens gives rise to the formation of a characteristic relief on their surface, as well as a layer in the near-su… Show more

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Cited by 6 publications
(10 citation statements)
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“…Besides, reflections attributable to cubic Ag 2 O (2 θ = 32.8°, 38.2° according to ICDD PDF 00-041-1104) are appeared. It should be noted that the simulation of the implantation process performed in [ 25 ] using the TRIM2008 program package allowed us to state that the introduced impurity is mainly localized in the subsurface region (~100 nm) of MCT. The ellipsometry data also indicate the formation, in the silver-implanted CdHgTe/CdZnTe samples, of a distorted ~100-nm-thick layer with anomalous values of the extinction and refractory coefficients [ 25 ].…”
Section: Resultsmentioning
confidence: 99%
“…Besides, reflections attributable to cubic Ag 2 O (2 θ = 32.8°, 38.2° according to ICDD PDF 00-041-1104) are appeared. It should be noted that the simulation of the implantation process performed in [ 25 ] using the TRIM2008 program package allowed us to state that the introduced impurity is mainly localized in the subsurface region (~100 nm) of MCT. The ellipsometry data also indicate the formation, in the silver-implanted CdHgTe/CdZnTe samples, of a distorted ~100-nm-thick layer with anomalous values of the extinction and refractory coefficients [ 25 ].…”
Section: Resultsmentioning
confidence: 99%
“…At the same time, the surface irradiation to the double dose at an angle of 90 ∘ results in a degradation of the CdHgTe film surface. It should be noted that the irradiation of CdHgTe films with boron ions in the same experimental geometry (at the normal incidence of an ionic beam on the surface of specimens), with the same energy, and to the same dose as in the case with silver ions results in a surface damage that is substantially different by the character and the damaged layer thickness [16]. No nanostructuring of the surface is observed in that case.…”
Section: Discussionmentioning
confidence: 95%
“…No nanostructuring of the surface is observed in that case. The character of CdHgTe crystal lattice distortions is also different: maximum mechanical stresses max in the damaged layer differ by two orders of magnitude, being similar to the squeezing in the case of boron (∼10 3 Pa [16]), and the crystal lattice is stretched (∼10 5 Pa [16]) at the implantation with larger ions (Ag + ) .…”
Section: Discussionmentioning
confidence: 99%
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