Role of ozone in reactive coevaporation of lead zirconate titanate thin films

Abstract

The role of ozone in the reactive coevaporation of the lead zirconate titanate thin film was investigated by depositing films at various growth rates with various ozone fluxes or molecular oxygen fluxes on unheated substrates and then crystallizing them using rapid thermal annealing. The oxidation state of lead in the as-deposited film was determined from the ratio of the ozone to the total metal fluxes. The amount of atomic oxygen supplied to the surface of the film was at least 10 3 times larger when the deposition was done using ozone rather than molecular oxygen. When the ozone flux was more than one-third of the total metal flux, well-oxidized films were obtained. To ensure obtaining well-oxidized film, the ozone flax should be more than twice as much.

Effect of hot filament on preparation of YBCO superconducting films by pulsed laser ablation in nitrous oxide gas

“…For growth of high-quality oxide films, e.g., ferroelectric, ferromagnetic, and superconducting films, on various substrates at low substrate temperatures, the effects of ambient gas in various growth techniques have been studied using oxygen (O 2 ) [1], nitrous oxide (N 2 O) [1], ozone gases (O 3 ) [2], and so on. In the present study, oxide films were prepared in N 2 O ambient gas by pulsed laser ablation (PLA) using a hot filament.…”