Role of substrate and annealing on microstructural, optoelectronic and luminescence properties of RF magnetron sputtered AZO thin films in confocal configuration

Mohamedi, Mohamed; Challali, Fatiha; Touam, Tahar; Mendil, Djelloul; Ouhenia, Salim; Souici, Abdelhafid; Djouadi, D.; Chelouche, A.

doi:10.1016/j.jlumin.2022.118739

Cited by 10 publications

(3 citation statements)

References 76 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…An optimum FOM value of 6.37×10 -3 Ω -1 has been obtained for AZO thin films prepared using powder targets with a bulk density of 3.00 g/cm 3 . This value is comparable to or higher than those reported in other studies [47]- [49]. Therefore, the AZO thin films prepared in this study are suitable for optoelectronic device applications.…”

Section: E Figure Of Meritsupporting

confidence: 87%

Sputtering Deposition With Low Cost Multi-Element Powder Targets

Ohshima

2023

IEEE Open J. Nanotechnol.

View full text Add to dashboard Cite

Compared to solid target, powder target is low cost and can be varied in wide range of elemental combinations. Transparent and conductive aluminum-doped zinc oxide (AZO) thin films were prepared by sputter deposition using a mixed powder target consisting of zinc oxide and aluminum oxide powders at 98:2 wt%. The bulk density of the powder target can be varied depending on the pressing pressure. Therefore, AZO thin films were prepared on Si and sapphire substrates using powder targets with different bulk densities (ρpowder) ranging from 0.898 to 3.00 g/cm 3 . The fabricated structural, electrical, and optical properties of the AZO thin films were examined, and the relationships between the target bulk density and film properties were investigated. X-ray diffraction measurements revealed c-axis ZnO (002) diffraction peaks, corresponding to crystallite growth oriented perpendicular to the substrate. Hall effect measurements showed n-type conductivity, with carrier density and Hall mobility increasing as the bulk density of the powder target increased. At ρpowder = 3.00 g/cm 3 , the AZO thin film on the Si substrate showed the lowest resistivity of 1.35×10 -3 Ω•cm. UV-visible spectroscopy measurements showed that the average transmittance in the visible light region exceeded 80% for the AZO thin films on the sapphire substrates. The figure of merit was calculated as a measure of the potential application in optoelectronic devices, resulting in 6.37×10 -3 Ω -1 for ρpowder = 3.00 g/cm 3 . This research contributes to Nagasaki University's goal of "planetary health".

show abstract

Section: E Figure Of Meritsupporting

confidence: 87%

Sputtering Deposition With Low Cost Multi-Element Powder Targets

Ohshima

2023

IEEE Open J. Nanotechnol.

View full text Add to dashboard Cite

show abstract

“…As a result, spin-coating is found to be a feasible, cost-effective, and reproducible technique. − Moreover, the effect of the lattice mismatch and the extinction coefficient between the film and sample holders on the presented characteristics cannot be ignored. These parameters directly affect the physical and chemical properties of ZnO NPs already reported in the literature. − Furthermore, many research groups have investigated the humidity-sensing properties of Al-doped ZnO nanomaterials and found them to possess high sensitivity, a low response time, and low power expenditure. − In the present investigation, pure as well as Al-doped nanocrystalline ZnO thin films are fabricated by a simple, low-cost, easy-to-dope, and large-scale chemical solution spin-coating deposition technique. The structural and surface morphological analyses are performed by XRD and AFM/SEM techniques for Al-doped ZnO thin films.…”

Section: Introductionmentioning

confidence: 90%

Environmentally Benign Structural, Topographic, and Sensing Properties of Pure and Al-Doped ZnO Thin Films

Dubey¹,

Zaidi

Awasthi

2022

ACS Omega

View full text Add to dashboard Cite

In the present research work, Zn 1– x Al x O thin films with varying proportions of Al ( x = 0.00, 0.01, 0.02, and 0.03) are prepared by a chemical sol–gel spin-coating technique. The crystal structural, morphological, and humidity-sensing properties of the synthesized Zn 1– x Al x O thin films, with varying concentrations of Al ( x = 0.00, 0.01, 0.02, and 0.03), were characterized by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM); a special humidity-controlled chamber was designed for the humidity-sensing studies. In structural and phase analyses, XRD patterns of Zn 1– x Al x O thin films show a hexagonal wurtzite crystal structure. The average crystallite sizes of Zn 1– x Al x O thin films were calculated and found to be ∼18.00, 22.50, 26.30, and 29.70 nm using the X-ray diffraction (XRD) pattern. The surface morphology of Zn 1– x Al x O Al ( x = 0.00, 0.01, 0.02, and 0.03) thin films obtained from AFM micrographs analysis indicates the modification of the spherical grains into nanorods, which were distributed throughout the surface of the films. The SEM image of 3 wt % Al-doped ZnO nanomaterials also shows that spherical nanoparticles changed to nanorod-like structures with a high packing density. Furthermore, increasing the Al-doping concentration from 0 to 3 wt % in ZnO NPs shows lower hysteresis loss, less aging effect, and good sensitivity in the range of 9.8–16.5 MΩ/%RH. The sensitivity of the sensing materials increased with increasing Al-doping concentration, which is very useful for humidity sensors.

show abstract

“…According to the literature, the performance of AZO thin films was explored by varying several parameters such as substrate [58][59][60] and solvent type [29,52], dopant concentration [34,61], annealing temperature [62] and thickness (number of layers) [31]. It was observed that the PL properties are strongly influenced by the previously mentioned factors, especially by the type of substrate used [63], amount of dopant [54][55][56] and annealing temperature [64]. A more recent paper reported by Patel et al [60] represents a review of AZO thin films prepared by different methods and deposited on different substrates to demonstrate their influence on the film properties.…”

Section: Introductionmentioning

confidence: 99%

Effect of Al Incorporation on the Structural and Optical Properties of Sol–Gel AZO Thin Films

et al. 2023

View full text Add to dashboard Cite

ZnO and Al-doped ZnO (AZO) thin films were prepared using the sol–gel method and deposited on a Silicon (Si(100)) substrate using the dipping technique. The structure, morphology, thickness, optical constants in the spectral range 300–1700 nm, bandgap (Eg) and photoluminescence (PL) properties of the films were analyzed using X-ray diffractometry (XRD), X-ray fluorescence (XRF), atomic force microscopy (AFM), scanning electron microscopy (SEM), spectroscopic ellipsometry (SE), Raman analysis and PL spectroscopy. The results of the structure and morphology analyses showed that the thin films are polycrystalline with a hexagonal wurtzite structure, as well as continuous and homogeneous. The PL background and broader peaks observable in the Raman spectra of the AZO film and the slight increase in the optical band gap of the AZO thin film, compared to undoped ZnO, highlight the effect of defects introduced into the ZnO lattice and an increase in the charge carrier density in the AZO film. The PL emission spectra of the AZO thin film showed a strong UV line corresponding to near-band-edge ZnO emission along with weak green and red emission bands due to deep-level defects, attributed to the oxygen-occupied zinc vacancies (OZn lattice defects).

show abstract

Role of substrate and annealing on microstructural, optoelectronic and luminescence properties of RF magnetron sputtered AZO thin films in confocal configuration

Cited by 10 publications

References 76 publications

Sputtering Deposition With Low Cost Multi-Element Powder Targets

Sputtering Deposition With Low Cost Multi-Element Powder Targets

Environmentally Benign Structural, Topographic, and Sensing Properties of Pure and Al-Doped ZnO Thin Films

Effect of Al Incorporation on the Structural and Optical Properties of Sol–Gel AZO Thin Films

Contact Info

Product

Resources

About