Role of the gold film nanostructure on the nanomechanical response of microcantilever sensors

Mertens, Johan; Calleja, Montserrat; Ramos, Daniel; Tarýn, A.; Tamayo, Javier

doi:10.1063/1.2434011

Cited by 47 publications

(45 citation statements)

References 34 publications

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“…The experimental work carried out during the last decade on DNA SAMs on microcantilever surfaces has revealed that the mechanical signatures of SAMs of single and double stranded DNA (ssDNA and dsDNA) strongly depend on the immobilization protocols used, 11,12 the gold nanostructure 13,14 and even the electrostatic forces during immobilization. 15,16 Recent theoretical and experimental work has highlighted the fact that even slightly different experimental conditions, such as ionic strength, temperature or pH variations during immobilization, may lead to largely divergent mechanical effects.…”

Section: Introductionmentioning

confidence: 99%

“…19,24 For such purpose, sophisticated nanografting methods need to be applied. 25,26 Alternatively, the gold layer needs to comply with very restrictive conditions regarding surface roughness 13 and surface electrostatics, 16 while long incubation times are also applied, 24 which bans the use of technologies for high multiplexing, such as ink-jet low volume dispensing. 3,10 In this work we study the effect of relative humidity (RH) changes in ssDNA and dsDNA SAMs on gold.…”

Section: Introductionmentioning

confidence: 99%

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Hydration Induced Stress on DNA Monolayers Grafted on Microcantilevers

et al. 2014

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Surface tethered single-stranded DNA films are relevant biorecognition layers for oligonucleotide sequence identification. Also, hydration induced effects on these films have proven useful for the nanomechanical detection of DNA hybridization. Here, we apply nanomechanical sensors and atomic force microscopy to characterize in air and upon varying relative humidity conditions the swelling and deswelling of grafted single stranded and double stranded DNA films. The combination of these techniques validates a two-step hybridization process, where complementary strands first bind to the surface tethered single stranded DNA probes and then slowly proceed to a fully zipped configuration. Our results also demonstrate that, despite the slow hybridization kinetics observed for grafted DNA onto microcantilever surfaces, ex-situ sequence identification does not require hybridization times typically longer than 1 hour, while quantification is a major challenge.. 2

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Hydration Induced Stress on DNA Monolayers Grafted on Microcantilevers

et al. 2014

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“…Their domains have to be aligned close to one direction by applying an electric field on the films in order to exhibit a net piezoelectric effect. Consequently, the polarization vector can be reoriented along different directions, allowing polycrystalline PZT films to utilize either or modes [31,32]. In contrary, the polarization direction of the ZnO and AlN [33] or epitaxial PZT thin films is fixed by the crystal structure, and thus reorientation to other directions is not possible.…”

Section: Piezoelectric Mems Structures and Operation Modesmentioning

confidence: 99%

“…Additionally, it is also used for the device design optimization, in order to find the optimal parameters. Many previous researches have developed analytical power models describing the effect of the parameters on the generated output power of the piezoelectric energy harvesters [31][32][33][34][35][36][37][38]. In this work, the analytical power model for a piezoelectric bimorph cantilever with a mass placed on the free end developed by Roundy et al is applied [12].…”

Section: Analytical Power Model For Piezoelectric Energy Harvestersmentioning

confidence: 99%

Epitaxial piezoelectric MEMS on silicon

Isarakorn

Sambri

Janphuang

et al. 2010

J. Micromech. Microeng.

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Integration of new functional materials into silicon microsystems is a key factor to enable technology for a wide range of innovative MEMS devices. Piezoelectric materials are of primary interest for integrating sensing and actuation functions in MEMS due to their high forces and high energy densities. The use of PZT thin films in MEMS applications offers the possibility of increasing the sensitivity or actuation capabilities of the devices compared to alternatives such as AlN and ZnO. In general, PZT thin films exhibit smaller piezoelectric coefficients and polarizations than PZT bulk materials due to grain size, composition, crystallographic orientation, non-defined stoichiometry and mechanical boundary conditions. Moreover, PZT thin films are typically grown onto amorphous surfaces resulting in polycrystalline structures, which often lead to degraded performance due to fatigue and aging characteristics. Since epitaxial PZT films exhibit properties, including piezoelectric coefficients, polarizations, and dielectric constants, generally superior to polycrystalline films, it is of high interest to consider their application in MEMS devices, however, there are some real challenges to be solved. Once these issues are overcome, epitaxial PZT thin films could offer interesting potentials in the realization of high performance piezoelectric MEMS.In this thesis, several aspects related to the development of epitaxial piezoelectric MEMS on silicon are investigated, which cover the following topics: the deposition and integration of high quality epitaxial PZT thin films on silicon wafers; the establishment of microfabrication techniques with associated process flows; and the FEM supported design, and characterization of epitaxial piezoelectric MEMS. A short overview is first given on the current state-of-the-art of piezoelectric MEMS. The integration of epitaxial oxide films on silicon wafers and their properties is then briefly described. The epitaxial oxide thin film heterostructures are based on a piezoelectric Pb(Zr 0.2 Ti 0.8 )O 3 layer grown on 2″ silicon wafers through two oxide layers: SrTiO 3 used as buffer and metallic SrRuO 3 used as bottom electrode. The optimized microfabrication process for these oxide layers with specific attention in maintaining the piezoelectric properties of the epitaxial PZT films is presented. The polarization was measured to optimize their processing with at the end no degradation of the piezoelectric properties throughout the process. The epitaxial PZT thin films exhibit a large load. The second application is based on an epitaxial PZT membrane to produce a resonating device.The study of basic characteristics of such device has shown excellent results as it shows a strong harmonic oscillation response with a high quality factor at atmospheric pressure. The finite element model of the epitaxial PZT membrane has then been developed for localized-mass sensing application to determine the resonant frequency, and the effect of the position of the mass and of the resonant mode o...

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“…As outcome of previous investigations, 16,22,23 it is known that the adequate performance of the DNA biomechanical sensors requires the coverage of the cantilever surface by a thick enough gold layer of about 20 nm. In order to ensure that the gold layer grown by PLD meets this requirement, gold deposition was carried out using 144 000 laser pulses (Table I).…”

Section: A Fabrication and Characterization Of Coated Substratesmentioning

confidence: 99%

Gold coating of micromechanical DNA biosensors by pulsed laser deposition

Rebollar

Sanz

Esteves³

et al. 2012

Journal of Applied Physics

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Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks J. Appl. Phys. 113, 064501 (2013) Multi-layered dielectric cladding plasmonic microdisk resonator filter and coupler Phys. Plasmas 20, 020701 (2013) Micromachined piezoelectric microphones with in-plane directivity Appl. Phys. Lett. 102, 054109 (2013) Referee acknowledgment for 2012 Biomicrofluidics 7, 010201 (2013) Introducing a well-ordered volume porosity in 3-dimensional gold microcantilevers Appl. Phys. Lett. 102, 053501 (2013) Additional information on J. Appl. Phys. In this work, we describe the gold-coating of silicon microcantilever sensors by pulsed laser deposition (PLD) and their performance as DNA biosensors. To test optimum deposition conditions for coating the sensors, silicon substrates were gold coated by PLD using the fifth harmonic of a Nd:YAG laser (213 nm, pulse duration 15 ns). The gold deposits were characterized by atomic force microscopy and x-ray diffraction. The adequate conditions were selected for coating the sensors with a 20 nm thick gold layer and subsequently functionalized with a selfassembled monolayer of thiolated DNA. To verify PLD as a tool for gold coating of biomechanical sensors, they were characterized by using a scanning laser analyzer platform. Characterization consisted in the measurement of the differential stress of the cantilevers upon hydration forces before and after functionalization with a double-stranded DNA monolayer. The measurements showed that the sensor surface stress induced by the adsorption of water molecules is approximately seven times higher than that of functionalized sensors gold coated by thermal evaporation. These results indicate that gold coating by PLD could be an advantageous method to enhance the response of biomechanical sensors based on gold-thiol chemistry. V C 2012 American Institute of Physics. [http://dx

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Role of the gold film nanostructure on the nanomechanical response of microcantilever sensors

Cited by 47 publications

References 34 publications

Hydration Induced Stress on DNA Monolayers Grafted on Microcantilevers

Hydration Induced Stress on DNA Monolayers Grafted on Microcantilevers

Epitaxial piezoelectric MEMS on silicon

Gold coating of micromechanical DNA biosensors by pulsed laser deposition

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