Role of Tribochemistry in Nanowear of Single-Crystalline Silicon

Yu, Jiaxin; Kim, Seong H.; Yu, Bingjun; Qian, Linmao; Zhou, Zhongrong

doi:10.1021/am201763z

Cited by 96 publications

(141 citation statements)

References 48 publications

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“…In atomic force microscopy (AFM) experiments, the amorphous SiO 2 was shown to be worn with a SiO 2 tip under a low load, while a diamond tip, which is chemically inert yet harder than the SiO 2 , was unable to wear the Si wafer coated with native oxide under a similar load [118,119]. These results suggested that the chemistry of the SiO 2 surfaces contributes to the wear of the material at loads lower than the hardness value causing mechanical deformation of the material.…”

Section: Environmental Effect On Friction and Wear Of Oxides And Glassesmentioning

confidence: 99%

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

et al. 2015

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Tribology involves not only two-body contacts of two solid materials-a substrate and a counter-surface; it often involves three-body contacts whether the third body is intentionally introduced or inevitably added during the sliding or rubbing. The intentionally added third body could be lubricant oil or engineered nanomaterial used to mitigate the friction and wear of the sliding contact. The inevitably added third body could be wear debris created from the substrate or the counter surface during sliding. Even in the absence of any solid third-body between the sliding surfaces, molecular adsorption of water or organic vapors from the surrounding environment can dramatically alter the friction and wear behavior of solid surfaces tested in the absence of lubricant oils. This review article covers the last case: the effects of molecular adsorption on sliding solid surfaces both inevitably occurring due to the ambient test and intentionally introduced as a solution for engineering problems. We will review how adsorbed molecules can change the course of wear and friction, as well as the mechanical and chemical behavior, of a wide range of materials under sliding conditions.

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Section: Environmental Effect On Friction and Wear Of Oxides And Glassesmentioning

confidence: 99%

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

et al. 2015

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“…The hydrophobization of the contact area on the SiO 2 tip and the silicon surface would reduce both the friction force and the wear rate, as shown in Fig. 11(c) [35,36].…”

Section: Friction-induced Reduction Of Adhesion During the Running-inmentioning

confidence: 99%

Running-in process of Si-SiO x /SiO2 pair at nanoscale—Sharp drops in friction and wear rate during initial cycles

et al. 2013

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Abstract:Using an atomic force microscope, the running-in process of a single crystalline silicon wafer coated with native oxide layer (Si-SiO x ) against a SiO 2 microsphere was investigated under various normal loads and displacement amplitudes in ambient air. As the number of sliding cycles increased, both the friction force F t of the Si-SiO x /SiO 2 pair and the wear rate of the silicon surface showed sharp drops during the initial 50 cycles and then leveled off in the remaining cycles. The sharp drop in F t appeared to be induced mainly by the reduction of adhesion-related interfacial force between the Si-SiO x /SiO 2 pair. During the running-in process, the contact area of the Si-SiO x /SiO 2 pair might become hydrophobic due to removal of the hydrophilic oxide layer on the silicon surface and the surface change of the SiO 2 tip, which caused the reduction of friction force and the wear rate of the Si-SiO x /SiO 2 pair. A phenomenological model is proposed to explain the running-in process of the Si-SiO x /SiO 2 pair in ambient air. The results may help us understand the mechanism of the running-in process of the Si-SiO x /SiO 2 pair at nanoscale and reduce wear failure in dynamic microelectromechanical systems (MEMS).

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“…For example, the nanowear results of silicon surfaces could vary significantly when rubbing against different countersurfaces [14][15][16]. A deep wear of silicon in humid environments occurred only when the counter-surface was SiO 2 , while a hillock formation on the silicon substrate was observed when the counter-surface was diamond [14].…”

Section: Introductionmentioning

confidence: 99%

Effects of humidity and counter-surface on tribochemical wear of soda-lime-silica glass

Qian

Pantano

et al. 2015

Wear

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a b s t r a c tThe effects of counter-surface chemistry on the friction and wear of soda-lime-silica glass were investigated using a ball-on-flat tribometer with various ball materials (stainless steel, silicon nitride, and alumina) in dry and humid environments. It was found that the interfacial wear was very sensitive to environmental humidity and counter-surface chemistry. In dry conditions, soda-lime glass was damaged mechanically regardless of counter-surface materials, creating a rough and deep wear track. These results were consistent with the Archard relationship-a softer material would wear mechanically by a harder material. However, in humid conditions, the ball materials that were harder than the soda-lime glass were damaged. Thus, the wear of glass interfaces under humid conditions does not follow the Archard relationship. These results clearly show that the tribochemical reactions involving the substrate and counter-surface chemistry as well as the adsorbed water molecules are determining factors governing wear behaviors in humid environments.

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Role of Tribochemistry in Nanowear of Single-Crystalline Silicon

Cited by 96 publications

References 48 publications

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

Running-in process of Si-SiO x /SiO2 pair at nanoscale—Sharp drops in friction and wear rate during initial cycles

Effects of humidity and counter-surface on tribochemical wear of soda-lime-silica glass

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