Room temperature deposited highly conductive HfNx films for high-performance HfN/Si junction diodes

Khan, Amir Sohail; Iqbal, Shahid; Duy, Le Thai; Kumar, Ashish; Khan, Muhammad Waqas; Kumar, Mohit; Seo, Hyungtak

doi:10.1016/j.surfin.2024.105045

Surfaces and Interfaces

2024

DOI: 10.1016/j.surfin.2024.105045

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Room temperature deposited highly conductive HfNx films for high-performance HfN/Si junction diodes

Amir Sohail Khan,

Shahid Iqbal,

Le Thai Duy

et al.

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Room temperature deposited highly conductive HfNx films for high-performance HfN/Si junction diodes

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References 69 publications

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