2006
DOI: 10.1116/1.2151913
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Room-temperature nanocontact printing using soft template

Abstract: Articles you may be interested inFacile fabrication of functional PDMS surfaces with tunable wettablity and high adhesive force via femtosecond laser textured templating A new approach to fabricating high density nanoarrays by nanocontact printing Direct pattern transfer technology by room-temperature nanocontact printing using hydrogen silsesquioxane ͑HSQ͒ and Ag paste, which takes advantage of adhesion properties of these transfer materials, has been developed. The use of poly͑ethylene͒ laminated on poly͑met… Show more

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Cited by 13 publications
(11 citation statements)
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“…[ 40 ] The use of poly(ethylene) laminated on poly(methylmethacrylate) sheet has been proposed as the soft template for the nanocontact printing. [ 45 ] Nakarnatsu et al . reported that the hydrogen silsesquioxane (HSQ) transferred pattern with 35 nm line width was obtained onto Si surface.…”
Section: Progress Reportmentioning
confidence: 98%
See 1 more Smart Citation
“…[ 40 ] The use of poly(ethylene) laminated on poly(methylmethacrylate) sheet has been proposed as the soft template for the nanocontact printing. [ 45 ] Nakarnatsu et al . reported that the hydrogen silsesquioxane (HSQ) transferred pattern with 35 nm line width was obtained onto Si surface.…”
Section: Progress Reportmentioning
confidence: 98%
“…reported that the hydrogen silsesquioxane (HSQ) transferred pattern with 35 nm line width was obtained onto Si surface. [ 45 ] Nanocontact printing process has also been used to fabricate dot arrays of different size features. A micromachined elastomeric PDMS stamp with two dimensional arrays of pyramidal tips were used to array dot pattern with variable dot size and density.…”
Section: Progress Reportmentioning
confidence: 99%
“…As with other material classes addressed in this review, alternative stamp materials are sometimes more desirable than PDMS for printing. For example, due to its relatively high modulus and ability to resist solvent swelling,327 PMMA is useful for transfer printing of materials such as resists for electron beam lithography, hydrogen silsequioxane (HSQ), and conductive silver paste 327. Previously described PUA stamps have also been used to print polymers, by first coating their surfaces with aluminum to facilitate release, and then with a desired polymer film (such as poly(vinyl acetate) (PVAc)).…”
Section: Organic Materialsmentioning
confidence: 99%
“…However, patterning the surface chemistry and topology at the molecular level is required to control both the adsorption of proteins and cells at well-defined locations on substrates for high sensitivity bio-devices fabrication [1 -3]. Nakamatsu et al had fabricated a two-layered soft template: a film of polyethylene laminated on a poly(methyl methacrylate) (PMMA) sheet, and obtained a 35 nm HSQ transferred line pattern onto a Si surface at room temperature with 0.3 MPa press pressure [4]. Therefore, nanocontact printing of organosilanes can be utilized to generate nanoscale patterns at low temperature and pressure for the accurate placement of proteins and cells on silicon oxide substrates.…”
Section: Introductionmentioning
confidence: 99%