Room temperature ozone sensing with KI layers integrated in HSGFET gas sensors

Fuchs, Anne; Bogner, Martin; Doll, Theodor; Eisele, I.

doi:10.1016/s0925-4005(98)00060-4

Cited by 25 publications

(8 citation statements)

References 7 publications

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“…For sol-gel prepared In O films, the highest sensitivity (about 22) to 45 ppb ozone is reached at 100 C [12]. Sputtered thin In O films show the strongest change in conductivity (about 2) due to 100 ppb at about 300 C [9]. Additionally, at 600 C, the In O -modified Ga O thin films show much greater responses at comparable ozone concentrations than the pure In O films reported in [9] and [11] at their maximum.…”

Section: Discussionmentioning

confidence: 99%

“…The first one was equipped with a photochemical ozone generator, the constant gas flow through the 120 cm gas chamber being 350 cm /min. The ozone concentration was monitored and adjusted online [9]. Using the second gas measuring unit, the cross-sensitivities to some relevant gases were examined with a constant gas flow of 1000 cm /min of mixtures of wet synthetic air with the test gases going through a 250 cm gas chamber.…”

Section: Methodsmentioning

confidence: 99%

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Ozone sensing using In/sub 2/O/sub 3/-modified Ga/sub 2/O/sub 3/ thin films

et al. 2001

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It is shown that at elevated temperatures the conductance of anIn 2 O 3 -modified Ga 2 O 3 thin film depends significantly and reversibly on the ozone concentration in the ambient air. This ozone sensitivity is much greater than with pure Ga 2 O 3 or In 2 O 3 thin films, respectively. The ozone sensitivity of the In 2 O 3 -modified Ga 2 O 3 thin film is characterized by an impressive selectivity, and is maximal at an operation temperature of about 600 C. The cross sensitivities to other gases present in ambient conditions are small compared to the ozone sensitivity, thus opening the way to use this system for ambient ozone monitoring. The results are discussed using an electron injection model. Ga 2 Index Terms-Ga 2 O 3 , gas sensor, In 2 O 3 , metal oxide, thin film.

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Section: Discussionmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Ozone sensing using In/sub 2/O/sub 3/-modified Ga/sub 2/O/sub 3/ thin films

et al. 2001

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“…18,21,22 Ozone is known to oxidise aromatic rings in the gas phase via addition to the aromatic ring 23 and is exploited in the fluorene and gallic acid coatings. Furthermore, addition of ozone to gallic acid is utilised in the widely used chemiluminescence instrument developed by Guesten et al, 24 based on the reactive reagent development by Sahand et al, 25 and Speuser et al 26 Ozone will also oxidise unsaturated hydrocarbons via addition to the double bond 27 and this property is utilised in the beeswax and polybutadiene coatings. Furthermore, beeswax has been shown to be an ozone-reactive wax in a recent study by Cape et al, 20 as it contains unsaturated long chain hydrocarbons.…”

Section: Coating Testsmentioning

confidence: 99%

“…KI has previously been used as an active coating in HSGFET gas sensors. 27 However at RH above 65% KI underwent agglomeration on the sensor surface and the sensor signal was lost, limiting the applicability of the sensor to a narrow window of humidity conditions. Fuchs et al, 27 also suggested KCl could be used as an active coating, but the sensitivity was shown to be reduced by a factor of $2.…”

Section: Coating Testsmentioning

confidence: 99%

Evaluation of coated QCM for the detection of atmospheric ozone

Muller

Smith

Newton

et al. 2011

Analyst

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A coated acoustic wave sensor has been developed to selectively detect atmospheric ozone. The selective detection has been assessed using a variety of coatings: beeswax, gallic acid, indigo carmine, polybutadiene, potassium iodide and sodium nitrite.Polybutadiene was the most sensitive with a limit of detection of 55 ppb. The sensitivity was improved by operating at higher harmonics and was shown to increase linearly with harmonic up to the 11* harmonic. This novel work shows that ozone detection can be improved by operating at the crystals' harmonic frequencies and in conjunction with a suitable flow rate, a potentially highly sensitive and fast response sensor can be created based on acoustic wave technology.

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“…Many of them are more within the range of laboratory methods than field testing. One exception is again the sensing of ozone: (115,116) an SGFET coated with potassium iodide was used for its monitoring. The theory of gas FETs indicates that the electronic work function at an interface between the semiconductor and a layer different from it can be influenced by gas adsorption.…”

Section: Field-effect Devicesmentioning

confidence: 99%

Solid‐state Sensors for Field Measurements of Gases and Vapors

Mujahid

Lieberzeit

Dickert

2000

Encyclopedia of Analytical Chemistry

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Remote and infield analysis is developing into a crucial aspect of modern analytical chemistry. Chemical sensors, which are small measuring devices consisting of a recognition layer, a transducer, and the measurement electronics, have proven to be highly suitable tools for this purpose. Although usually they are constructed for the detection of very limited amounts of chemical compounds and often do not reach the detection limits of modern analytical instruments, they show very desirable advantages: the systems are easy to operate, mostly rugged, small, of good value, and can be manufactured by established technological methods. Owing to their size and ruggedness, they can even be operated in harsh environments and often can be constructed to be suitable for remote measurements, where several sensors are interrogated by a central analytical site. Devices being used include optical fibers, field‐effect transistors (FETs), electrochemical cells (be they potentiometric or amperometric), and mass‐sensitive components of all kinds. The chemically sensitive coatings range from bare transducer surfaces to dyes reacting with analyte or sterically specific binding sites (e.g. host–guest complexes). A seeming drawback is the fact that only few sensors react specifically toward one defined component but normally show a sensitivity pattern toward chemically related substances. By using an array of several components followed by modern methods of data evaluation (such as neural networks), a group of analytes can be detected and characterized simultaneously. This article introduces device and recognition layer principles as well as covering field sensors published during the last one and a half decades based on all the different kinds of transducers and sensor layers. Some of the devices (such as the lambda probe) are already marketed, others are developed to a stage where field measurements have already been carried out, but which are not market‐ready.

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Room temperature ozone sensing with KI layers integrated in HSGFET gas sensors

Cited by 25 publications

References 7 publications

Ozone sensing using In/sub 2/O/sub 3/-modified Ga/sub 2/O/sub 3/ thin films

Ozone sensing using In/sub 2/O/sub 3/-modified Ga/sub 2/O/sub 3/ thin films

Evaluation of coated QCM for the detection of atmospheric ozone

Solid‐state Sensors for Field Measurements of Gases and Vapors

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