Roughness and nanotopography measurement of a Silicon Wafer using Wave Front Phase Imaging : High speed single image snapshot of entire wafer producing sub nm topography data

Trujillo-Sevilla, Juan M.; Ramos-Rodriguez, J.M.; Gaudestad, J.

doi:10.1109/asmc49169.2020.9185222

Cited by 2 publications

(1 citation statement)

References 7 publications

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“…To overcome this, the WaveFront Phase Imaging (WFPI) sensor has recently been presented in the literature to measure the phase in transparent objects with more resolution than Hartmann-Shack, being previously validated in other technical fields such as silicon metrology 13,14 , optical glass quality assessment 15,16 , and tested in ophthalmology 17 with healthy subjects and keratoconic patients by t•eyede prototype [18][19][20] . In the last work, the authors have demonstrated that this device is capable of reliably distinguishing between healthy and keratoconic eyes by means of the ocular aberrations (Astigmatism, Coma, and High Order Aberrations), besides exposing the relevance of the further orders than 10th by revealing a pattern of folds or bands in advanced keratoconus that have not been seen in phase results previously.…”

Section: Introductionmentioning

confidence: 99%

Clinical applicability of the WaveFront Phase Imaging Sensor in the Keratoconus Disease

Belda-Para,

Velarde-Rodríguez,

Velasco-Ocaña

et al. 2023

Preprint

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SignificanceThe analysis of the wavefront phase of keratoconus eyes has become increasingly important due to its impact on the assessment of visual quality loss, irrecoverable with conventional optical treatments, and the understanding of morphological changes in corneal structures.AimThe aim of this work is to quantitatively assess the wavefront phase of keratoconic eyes measured by the novel high-resolution ocular aberrometer t·eyede (based on WaveFront Phase Imaging Sensor).ApproachThe measurements with this device were taken on healthy and keratoconic eyes at the Hospital Universitario Fundación Jiménez Díaz (Madrid, Spain). The wavefront phase recovered is post-processed and displayed in different phase maps, using exclusively the high-pass filter map for this study. From this map, the Root Mean Square, the Peak-to-Valley, and the amplitude value of the predominant obtained from its Fourier Transform are the parameters to distinguish between healthy and keratoconic eyes. Furthermore, the banding pattern observed in most keratoconic eyes is quantitatively analyzed by means of its period and orientation calculated from the Fourier Transform.ResultsThe Control group was composed of 43 healthy eyes, and the Pathological group presented 43 keratoconic eyes. Regarding the first three parameters used to compare both groups, there were significant statistical differences between them in all parameters, where the values obtained with the keratoconic group were higher than those of the healthy group. Although the values cannot be statistically comparable between stages, they tended to increase according to the severity of the disease. On the other hand, analyzing the banding pattern, the mean value of the period was approximately 50 µm, and most orientations were obliquus, tending to be horizontal rather than vertical.ConclusionsThe present study demonstrates that the objective analysis of the high frequencies detected by this wavefront sensor is a potential tool to reliably advise in the keratoconus diagnosis. Furthermore, combining this achievement with the quantitative assessment of the banding pattern would be used to objectively monitor the internal corneal status throughout the disease and its treatment optimization and surgery time.

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Section: Introductionmentioning

confidence: 99%

Clinical applicability of the WaveFront Phase Imaging Sensor in the Keratoconus Disease

Belda-Para,

Velarde-Rodríguez,

Velasco-Ocaña

et al. 2023

Preprint

View full text Add to dashboard Cite

show abstract

Comparing the clinical applicability of wavefront phase imaging in keratoconus versus normal eyes

Belda-Para,

Velarde-Rodríguez,

Velasco-Ocaña

et al. 2024

Sci Rep

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The aim of this work is to quantitatively assess the wavefront phase of keratoconic eyes measured by the ocular aberrometer t·eyede (based on WaveFront Phase Imaging Sensor), characterized by a lateral resolution of 8.6 µm without requiring any optical element to sample the wavefront information. We evaluated the parameters: root mean square error, Peak-to-Valley, and amplitude of the predominant frequency (Fourier Transform analysis) of a section of the High-Pass filter map in keratoconic and healthy cohorts. Furthermore, we have analyzed keratoconic eyes that presented dark–light bands in this map to assess their period and orientation with the Fourier Transform. There are significant statistical differences (p value < 0.001) between healthy and keratoconic eyes in the three parameters, demonstrating a tendency to increase with the severity of the disease. Otherwise, the quantification of the bands reveals that the width is independent of eye laterality and keratoconic stage as orientation, which tends to be oblique. In conclusion, the quantitative results obtained with t·eyede could help to diagnose and monitor the progression of keratoconus.

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Roughness and nanotopography measurement of a Silicon Wafer using Wave Front Phase Imaging : High speed single image snapshot of entire wafer producing sub nm topography data

Cited by 2 publications

References 7 publications

Clinical applicability of the WaveFront Phase Imaging Sensor in the Keratoconus Disease

Clinical applicability of the WaveFront Phase Imaging Sensor in the Keratoconus Disease

Comparing the clinical applicability of wavefront phase imaging in keratoconus versus normal eyes

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