Roughness as an Important Metric for Si and SiGe Epi Growth

Yadav, Yogendra K; Bhatt, Piyush; Sathiyanarayanan, Rajesh; Stout, Phillip

doi:10.1109/edtm58488.2024.10511351

2024 8th IEEE Electron Devices Technology &Amp;amp; Manufacturing Conference (EDTM) 2024

DOI: 10.1109/edtm58488.2024.10511351

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Roughness as an Important Metric for Si and SiGe Epi Growth

Yogendra K Yadav,

Piyush Bhatt,

Rajesh Sathiyanarayanan

et al.

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Roughness as an Important Metric for Si and SiGe Epi Growth

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References 8 publications

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