RTP silicon oxynitrides to fabricate MOS tunnel diodes

Christiano, Veronica; Filho, Sebastião Gomes dos Santos

doi:10.1109/sbmicro.2013.6676135

28th Symposium on Microelectronics Technology and Devices (SBMicro 2013) 2013

DOI: 10.1109/sbmicro.2013.6676135

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RTP silicon oxynitrides to fabricate MOS tunnel diodes

Veronica Christiano

Sebastião Gomes dos Santos Filho

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RTP silicon oxynitrides to fabricate MOS tunnel diodes

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References 6 publications

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