1995
DOI: 10.1109/66.350755
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Run by run process control: combining SPC and feedback control

Abstract: Absfruet-The Run by Run Controller provides a framework for controlling a process which is subject to disturbances such as shifts and drifts as a normal part of its operation. The Run by Run Controller combines the advantages of both Statistical moCess Control (SPC) and Feedback Control. It has three components: Rapid Mode, Gradual Mode, and Generalized SPC. Rapid mode adapts to sudden shifts in the process such as those caused by maintenance operations. Gradual mode adapts to gradual drifts in the process suc… Show more

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Cited by 290 publications
(143 citation statements)
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“…This need has originated a collection of techniques called RtR control (Baras & Patel, 1996;Sachs, Hu, & Ingolfsson, 1995;Boning, Moyne, & Smith, 1995;Castillo & Yeh, 1998;Hankinson, Vincent, Irani, & Khargonekar, 1997;Ingolfsson & Sachs, 1993;Ning, 1996;Deng, 1999). RtR control is a form of discrete-time process control in which the product recipe with respect to a particular equipment process is modiÿed ex situ, i.e.…”
Section: Introductionmentioning
confidence: 99%
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“…This need has originated a collection of techniques called RtR control (Baras & Patel, 1996;Sachs, Hu, & Ingolfsson, 1995;Boning, Moyne, & Smith, 1995;Castillo & Yeh, 1998;Hankinson, Vincent, Irani, & Khargonekar, 1997;Ingolfsson & Sachs, 1993;Ning, 1996;Deng, 1999). RtR control is a form of discrete-time process control in which the product recipe with respect to a particular equipment process is modiÿed ex situ, i.e.…”
Section: Introductionmentioning
confidence: 99%
“…The reason why it generates the new recipe from the post-process measurements on a run-to-run basis is, on one hand, lack of on-line sensors for the process. On the other hand, frequent changes of inputs to the process may increase the variability of the process's output (Sachs et al, 1995). Sometimes, a deadband is utilized in order to make the model changes less frequent.…”
Section: Introductionmentioning
confidence: 99%
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