Ruthenium/aerogel nanocomposites via atomic layer deposition

Biener, Juergen; Baumann, Theodore F.; Wang, Yinming; Nelson, Erik J.; Kucheyev, S. O.; Hamza, A. V.; Kemell, Marianna; Ritala, Mikko; Leskelä, Markku

doi:10.1088/0957-4484/18/5/055303

Cited by 77 publications

(80 citation statements)

References 35 publications

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“…One of these is an atomic layer deposition (ALD) process in which high-Z atoms, like Ru, are deposited on the strands of carbon aerogel foam [18]. In another development, fabrication of pure-metal foams has begun.…”

Section: Introductionmentioning

confidence: 99%

A computational study of x-ray emission from high-Z x-ray sources on the National Ignition Facility laser

Colvin

Fournier

Kane

et al. 2011

High Energy Density Physics

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We have begun to use 350-500 kJ of 1/3-micron laser light from the National Ignition Facility (NIF) laser to create millimeter-scale, bright multi-keV x-ray sources. In the first set of shots we achieved 15% -18% x-ray conversion efficiency into Xe M-shell (~1.5-2.5 keV), Ar K-shell (~3 keV) and Xe L-shell (~4-5.5 keV) emission (Fournier et al., Phys. Plasmas 17, 082701, 2010), in good agreement with the emission modeled using a 2D radiation-hydrodynamics code incorporating a modern Detailed Configuration Accounting atomic model in non-LTE (Colvin et al., Phys. Plasmas, 17, 073111, 2010). In this paper we first briefly review details of the computational model and comparisons of the simulations with the Ar/Xe NIF data. We then discuss a computational study showing sensitivity of the x-ray emission to various beam illumination details (beam configuration, pointing, peak power, pulse shape, etc.) and target parameters (size, initial density, etc.), and finally make some predictions of how the x-ray conversion efficiency expected from NIF shots scales with atomic number of the emitting plasma.

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Section: Introductionmentioning

confidence: 99%

A computational study of x-ray emission from high-Z x-ray sources on the National Ignition Facility laser

Colvin

Fournier

Kane

et al. 2011

High Energy Density Physics

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“…The relatively low nucleation density of ALD noble metals enables also the deposition of thin nanoparticulate noble metal films. [21,24] As compared to sol-gel and solution impregnation methods, ALD has some potential advantages. First, the dimensions of the metal catalyst and the underlying oxide film can be adjusted accurately by the number of ALD cycles applied.…”

Section: Resultsmentioning

confidence: 99%

Coating of Highly Porous Fiber Matrices by Atomic Layer Deposition

Kemell¹,

Ritala²,

Leskelä³

et al. 2008

Chemical Vapor Deposition

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The potential of atomic layer deposition (ALD) in the coating of highly porous, 0.5 mm thick, metal fiber matrices is explored. Three different reactor types are compared for ALD of Al 2 O 3 thin films from trimethylaluminum and water. Both an evacuation-type and a flow-type process are successful in forming conformal Al 2 O 3 coatings on the fibers. The coatings are able to protect the fibers against electrochemical corrosion and thermal oxidation. In addition, a metallic Ir thin film is deposited by ALD on one of the Al 2 O 3 -coated fiber matrices. This kind of a structure could be used, for example, as a catalytic filter.

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“…[10][11][12] However, for the conformal deposition on porous materials, the exposure time of precursor molecules should be much longer comparing with the exposure time on a flat substrate, because the chemisorption of the precursor is limited by the Knudsen diffusion on the internal surface of the porous materials. [13][14][15][16][17][18][19][20][21] In smaller pores with a longer depth, it is more difficult for the precursor to reach vacant sites which locate at the core of the porous materials. In addition, the number of adsorption sites in the porous materials is much higher than that in the flat substrate, due to their high specific surface area.…”

Section: 9mentioning

confidence: 99%

Modified Shrinking Core Model for Atomic Layer Deposition of TiO₂on Porous Alumina with Ultrahigh Aspect Ratio

Park¹,

Leem²,

Lee³

et al. 2013

Bulletin of the Korean Chemical Society

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When atomic layer deposition (ALD) is performed on a porous material by using an organometallic precursor, minimum exposure time of the precursor for complete coverage becomes much longer since the ALD is limited by Knudsen diffusion in the pores. In the previous report by Min et al. (Ref. 23), shrinking core model (SCM) was proposed to predict the minimum exposure time of diethylzinc for ZnO ALD on a porous cylindrical alumina monolith. According to the SCM, the minimum exposure time of the precursor is influenced by volumetric density of adsorption sites, effective diffusion coefficient, precursor concentration in gas phase and size of the porous monolith. Here we modify the SCM in order to consider undesirable adsorption of byproduct molecules. TiO 2 ALD was performed on the cylindrical alumina monolith by using titanium tetrachloride (TiCl 4 ) and water. We observed that the byproduct (i.e., HCl) of TiO 2 ALD can chemically adsorb on adsorption sites, unlike the behavior of the byproduct (i.e., ethane) of ZnO ALD. Consequently, the minimum exposure time of TiCl 4 (~16 min) was significantly much shorter than that (~ 71 min) of DEZ. The predicted minimum exposure time by the modified SCM well agrees with the observed time. In addition, the modified SCM gives an effective diffusion coefficient of TiCl 4 of ~1.78 × 10 −2 cm 2 /s in the porous alumina monolith.

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Ruthenium/aerogel nanocomposites via atomic layer deposition

Cited by 77 publications

References 35 publications

A computational study of x-ray emission from high-Z x-ray sources on the National Ignition Facility laser

A computational study of x-ray emission from high-Z x-ray sources on the National Ignition Facility laser

Coating of Highly Porous Fiber Matrices by Atomic Layer Deposition

Modified Shrinking Core Model for Atomic Layer Deposition of TiO₂on Porous Alumina with Ultrahigh Aspect Ratio

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Ruthenium/aerogel nanocomposites via atomic layer deposition

Cited by 77 publications

References 35 publications

A computational study of x-ray emission from high-Z x-ray sources on the National Ignition Facility laser

A computational study of x-ray emission from high-Z x-ray sources on the National Ignition Facility laser

Coating of Highly Porous Fiber Matrices by Atomic Layer Deposition

Modified Shrinking Core Model for Atomic Layer Deposition of TiO2on Porous Alumina with Ultrahigh Aspect Ratio

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Product

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Modified Shrinking Core Model for Atomic Layer Deposition of TiO₂on Porous Alumina with Ultrahigh Aspect Ratio