The techniques of ion implantation and Rutherford backscattering analysis have been used to determine the transport numbers of metal and oxygen during the anodic oxidation of vanadium. These were found to be 0.28 • 0.05 and 0.72 ~ 0.05, respectively. The Rutherford backscattering analysis simultaneously gives the ratio of V/O in the film. This was found to be 0.4 • 0.02 thus indicating that the films are V205. The result was confirmed by use of the nuclear reaction 160 (d,p) 170. ) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 134.117.10.200 Downloaded on 2015-06-14 to IP ) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 134.117.10.200 Downloaded on 2015-06-14 to IP