SAGAS: gas analyzing sensor systems based on surface acoustic wave devices-an issue of commercialization of SAW sensor technology

Rapp, M.; Reibel, J.; Stier, S.; Voigt, A.; Bahlo, J.

doi:10.1109/freq.1997.638532

Cited by 29 publications

(20 citation statements)

References 5 publications

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“…Chen et al showed a quartz SAW NH3 sensor with a Pt doped polypyrrole sensitive film, and they attributed the positive frequency shift to the variation of conductivity of film [31]. Similar work about either positive or negative frequency shift of the SAW NH3 sensor has been reported in many references [32][33][34].…”

Section: Introductionmentioning

confidence: 50%

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Tang

et al. 2018

Sensors and Actuators B: Chemical

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Northumbria University has developed Northumbria Research Link (NRL) to enable users to access the University's research output. Copyright © and moral rights for items on NRL are retained by the individual author(s) and/or other copyright owners. Single copies of full items can be reproduced, displayed or performed, and given to third parties in any format or medium for personal research or study, educational, or not-for-profit purposes without prior permission or charge, provided the authors, title and full bibliographic details are given, as well as a hyperlink and/or URL to the original metadata page. The content must not be changed in any way. Full items must not be sold commercially in any format or medium without formal permission of the copyright holder. The full policy is available online: http://nrl.northumbria.ac.uk/policies.html This document may differ from the final, published version of the research and has been made available online in accordance with publisher policies. To read and/or cite from the published version of the research, please visit the publisher's website (a subscription may be required.) This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. and SiO2-TiO2 films showed positive frequency shifts, whereas SiO2 film exhibits a negative frequency shift to NH3 gas. it is believed that the negative frequency shift was mainly caused by the increase of NH3 mass loading on the sensitive film while the positive frequency shift was associated to the condensation of the hydroxyl groups (-OH) on the film making the film stiffer and lighter, when exposed to NH3 gas. It demonstrated that humidity played a significant factor on the sensing performance. Comparative studies exhibited that the sensor based on the composite SiO2-TiO2 film had a much better sensitivity to NH3 at a low concentration level (1 ppm) with a response of 2 KHz, and also showed fast response and recovery, excellent selectivity, stability and reproducibility. Accepted Manuscript

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Section: Introductionmentioning

confidence: 50%

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Tang

et al. 2018

Sensors and Actuators B: Chemical

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“…12 a) and b), the CRF devices have twice the phase slope of a TPR in their filter pass bands and generally provide better stabilization of the sensor oscillator than the TPR, especially in measurements at high gas concentrations. In a realworld sensor system, the sensor oscillator is designed to operate on the right CRF resonant mode since the left one vanishes when the device is coated with a polymer film [6]. Typically, the sensor oscillator provides stable oscillation on the right mode and never jumps onto the left one since a 180 deg.…”

Section: Electrical Performance Comparison Of Au Vs Al Rsaw Sensor Rmentioning

confidence: 99%

“…Because of these features that are difficult to achieve with other technologies, RSAW based gas sensors have found successful application in a variety of industrial implementations such as electronic noses, systems for analysis of chemical and biological gases, medical diagnostics, environmental monitoring and protection, etc. [5][6][7][8][9][10][11]. On the other hand, surface transverse wave (STW) based gas sensors, even though sharing the same operation principle, have not been studied so extensively yet.…”

Section: Introductionmentioning

confidence: 99%

Polymer Coated Rayleigh SAW and STW Resonators for Gas Sensor Applications

Avramov¹

2011

Acoustic Waves - From Microdevices to Helioseismology

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“…A two-port RSAW resonator fabricated on a temperature compensated cut of piezoelectric quartz, typically ST-cut for minimum temperature sensitivity at room temperature, is coated with a thin chemosensitive layer and mounted in a sensor head [5]. The sensing layer should feature physical sorption.…”

Section: Operation Principle Of Polymer Coated Rsaw Based Resonant Sementioning

confidence: 99%

“…A two-port RSAW resonator coated with a chemosensitive polymer film makes an excellent high-resolution gas-phase sensor featuring fast response time, superb overall stability, high sensitivity and dynamic range and low sensor noise [3][4][5]. Such RSAW sensors currently find a variety of applications in sensor systems for analysis of chemical and biological gasses, medical diagnostics, electronic noses, environmental monitoring, etc.…”

Section: Introductionmentioning

confidence: 99%

Temperature Frequency Characteristics of Hexamethyldisiloxane (HMDSO) Polymer Coated Rayleigh Surface Acoustic Wave (SAW) Resonators for Gas-Phase Sensor Applications

2012

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Abstract:Temperature induced frequency shifts may compromise the sensor response of polymer coated acoustic wave gas-phase sensors operating in environments of variable temperature. To correct the sensor data with the temperature response of the sensor the latter must be known. This study presents and discusses temperature frequency characteristics (TFCs) of solid hexamethyldisiloxane (HMDSO) polymer coated sensor resonators using the Rayleigh surface acoustic wave (RSAW) mode on ST-cut quartz. Using a RF-plasma polymerization process, RSAW sensor resonators optimized for maximum gas sensitivity have been coated with chemosensitive HMDSO films at 4 different thicknesses: 50, 100, 150 and 250 nm. Their TFCs have been measured over a (−100 to +110) °C temperature range and compared to the TFC of an uncoated device. An exponential 2,500 ppm downshift of the resonant frequency and a 40 K downshift of the sensor's turn-over temperature (TOT) are observed when the HMDSO thickness increases from 0 to 250 nm. A partial temperature compensation effect caused by the film is also observed. A third order polynomial fit provides excellent agreement with the experimental TFC curve. The frequency downshift due to mass loading by the film, the TOT and the temperature coefficients are unambiguously related to each other.

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SAGAS: gas analyzing sensor systems based on surface acoustic wave devices-an issue of commercialization of SAW sensor technology

Cited by 29 publications

References 5 publications

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Polymer Coated Rayleigh SAW and STW Resonators for Gas Sensor Applications

Temperature Frequency Characteristics of Hexamethyldisiloxane (HMDSO) Polymer Coated Rayleigh Surface Acoustic Wave (SAW) Resonators for Gas-Phase Sensor Applications

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