Electron diffraction patterns are obtained of the orthorhombic and monoclinic structures of TaS3. For the orthorhombic structure one set of superlattice spots is observed at (l ± 0.5) a*, (m ± ± 0.125) b*, (n ± 0.25) c* below 210 K. For the monoclinic structure two sets of superlattice spots are observed, the first one at la*, (m ± 0.253) b*, nc* below 240 K, the second one at (l ± 0.5) a*, (m ± 0.245) b*, (n ± 0.5) c* below 160 K. Diffuse scattering lines are present for the two structures. Resistivity measurements are performed on crystals with the two structures, which show strong increase of the resistivity indicating metal‐semiconducting transitions at the same temperatures where the superlattice spots appear. These transitions are interpreted as successive Peierls transitions on the different types of chains of TaS3. Also electron diffraction patterns are shown of NbSe3 at very low temperatures where the two charge density waves that occur at 145 and 59 K are formed. A comparison is given between TaS3 and NbSe3.