SAW devices on diamond

Nakahata, H.; Higaki, K.; Fujii, Satoshi; Hachigo, A.; Kitabayashi, H.; Tanabe, K.; Seki, Y.; Shikata, Shinichi

doi:10.1109/ultsym.1995.495599

Cited by 56 publications

(37 citation statements)

References 15 publications

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“…This is because the diamond lattice is so stiff that the speed of sound through it is extremely fast (17 500 m s −1 ). In practice, the diamond film is part of a multilayered structure, with a piezo-electric material such as ZnO, LiNbO 3 or LiTaO 3 deposited on top of the diamond to convert the mechanical vibrations of the diamond to electrical signals (Nakahata et al 1996). Some companies (such as Sumitomo in Japan) are already exploiting diamond-based SAW filters in commercial mobile phone equipment, and it is likely that within a few years a diamond SAW filter will be an essential component of all high frequency communications equipment, including telephone networks, cable television and the Internet.…”

Section: P W Maymentioning

confidence: 99%

Diamond thin films: a 21st-century material

May

2000

Philosophical Transactions of the Royal Society of London. Seri

607

193

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Diamond has some of the most extreme physical properties of any material, yet its practical use in science or engineering has been limited due its scarcity and expense. With the recent development of techniques for depositing thin films of diamond on a variety of substrate materials, we now have the ability to exploit these superlative properties in many new and exciting applications. In this paper, we shall explain the basic science and technology underlying the chemical vapour deposition of diamond thin films, and show how this is leading to the development of diamond as a 21st century engineering material.

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Section: P W Maymentioning

confidence: 99%

Diamond thin films: a 21st-century material

May

2000

Philosophical Transactions of the Royal Society of London. Seri

607

193

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“…In order to increase the frequency, two approaches may be followed: 1) to improve lithography resolution and 2) to exploit confined modes in proper layer-substrate combinations (in particular, slow-on-fast structures). In this letter, both approaches have been done using the high sound velocity of some modes in AlN/diamond [1], [2] and submicrometer interdigital transducer (IDT) periods [3], [4]. The AlN/diamond system has attracted considerable interest recently not only for the combination of the strong piezoelectricity of A1N with the SAW velocity of diamond (of about 12 000 m/s [5], the largest of all materials) but also for its suitability for harsh environments [6].…”

Section: Introductionmentioning

confidence: 99%

Super-High-Frequency SAW Resonators on AlN/Diamond

Rodríguez-Madrid

Iriarte

Pedrós

et al. 2012

IEEE Electron Device Lett.

102

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Abstract-This letter describes the procedure to manufacture high-performance surface acoustic wave (SAW) resonators on AlN/diamond heterostructures working at frequencies beyond 10 GHz. In the design of SAW devices on AlN/diamond systems, the thickness of the piezoelectric layer is a key parameter. The influence of the film thickness on the SAW device response has been studied. Optimized thin films combined with advanced e-beam lithographic techniques have allowed the fabrication of one-port SAW resonators with finger width and pitch of 200 nm operating in the 10-14 GHz range with up to 36 dB out-of-band rejection.Index Terms-AlN/diamond, surface acoustic wave (SAW) resonator, super-high-frequency band, thickness influence.

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“…To decrease TCF value more and improve the property, Miura et al 12) developed a SAW device composed of a piezoelectric LiTaO 3 film bonded on Sapphire as a support substrate with small thermal expansion coefficient and large Young's modulus. Nakahata et al 13) and Emanetoglu et al 14) realized zero temperature coefficient of delay (TCD) by SiO 2 /ZnO/diamond/Si and ZnO/SiO 2 /Si multi-layered structures, respectively, composed of films and a substrate with positive and negative TCD value. They used the time for wave to propagate between two points as a measure instead of the resonant frequency.…”

Section: Introductionmentioning

confidence: 99%

Evaluation of Thermal Strain Suppression Design of Piezoelectric Ceramic Actuators

Uchida

Ikeda

Senba

et al. 2016

AEROSPACE TECHNOLOGY JAPAN

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Piezoelectric ceramic actuators with less thermal strain were designed by symmetrically stacking two kinds of piezoelectric ceramics plates whose linear expansion coefficients were positive and negative, and their performance was evaluated. Three types of actuators were examined, which have a different stacking direction. The electromechanical material constants were evaluated by a one-dimensional model and the results were compared with a three-dimensional finite element analysis. The result showed that the piezoelectric constant of an actuator stacked in the perpendicular direction to the electric field was about three times larger than that of an actuator stacked in the parallel direction, even though the volume ratio between the two kinds of plates was almost the same between the stacking types. This is because most of the voltage in the latter type was distributed to the piezoelectric plate with low permittivity and low piezoelectric constant. Therefore, it is important to consider the stacking direction and the permittivity in the design of the actuators. The three-dimensional finite element analysis showed the linear expansion coefficient was not zero even though it was zero in the one-dimensional model. Therefore, three-dimensional analysis is necessary for precise design, although the one-dimensional model provides good estimation of the electromechanical property.

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SAW devices on diamond

Cited by 56 publications

References 15 publications

Diamond thin films: a 21st-century material

Diamond thin films: a 21st-century material

Super-High-Frequency SAW Resonators on AlN/Diamond

Evaluation of Thermal Strain Suppression Design of Piezoelectric Ceramic Actuators

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