SAW Parameters Analysis and Equivalent Circuit of SAW Device

Hoang, Trang

doi:10.5772/19910

Cited by 11 publications

(7 citation statements)

References 46 publications

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“…A plethora of models have been proposed to facilitate the analysis of SAW devices, often by simplifying the intricate physical aspects of these devices. These models encompass the impulse model [5], equivalent circuit models [6], the coupling-of-modes (COM) model [7], the P-matrix model [8], and the scattering matrix approach [9]. In addition to these models, finite element methods (FEMs) [10,11] and boundary element methods (BEMs) [12][13][14] are also extensively employed for the analysis of SAW devices.…”

Section: Introductionmentioning

confidence: 99%

“…To enhance the precision of the COM model in such scenarios, it is crucial to refine the model to include these previously overlooked mutual capacitance effects. impulse model [5], equivalent circuit models [6], the coupling-of-modes (COM) model [7], the P-matrix model [8], and the scattering matrix approach [9]. In addition to these models, finite element methods (FEMs) [10,11] and boundary element methods (BEMs) [12][13][14] are also extensively employed for the analysis of SAW devices.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

An Improved Method to Compute the Mutual Capacitance between Interdigital Transducers in Radio Frequency Surface Acoustic Wave Filters

Zou,

Yang,

Luo

et al. 2024

Micromachines

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This paper proposes an improved method to calculate the mutual capacitance between interdigital transducer (IDT) electrodes to enhance the accuracy of the traditional coupling-of-modes (COM) model, which is commonly used to simulate surface acoustic wave (SAW) filters and duplexers. In this method, the boundary element method (BEM) is adopted to obtain the capacitance per unit length in a layered medium, while the partial capacitance (PC) method is used to derive the effective relative permittivity of the multi-layered IDT. Numerical results from commercially available software are provided for comparison with the results calculated using the proposed method. The consistent results verify the validity and accuracy of this method, which also demonstrates significantly faster calculation speed compared to commercially available software. Precise electrical response prediction of a dual-mode SAW (DMS) filter can be achieved by applying this method to the COM model, and this ultra-fast calculation method can also be included in filter design optimization.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

An Improved Method to Compute the Mutual Capacitance between Interdigital Transducers in Radio Frequency Surface Acoustic Wave Filters

Zou,

Yang,

Luo

et al. 2024

Micromachines

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“…Then, an orientation that allows a Shear-horizontal SAW (SH-SAW) mode to be obtained should be used e.g., Quartz, or LiNbO3 in 36°YX, 64°YX 8 orientation. The design of a SAW transducer can be focused on satisfying a specific frequency response that can be modeled using different tools such as transverse filter theory, equivalent circuit theory, mode-coupling theory, or delta model 9,10 . Despite all the modeling tools available, there is a growing interest in the use of numerical simulations to be a complementary tool in SAW transducer design due to the possibility to represent the anisotropic properties of the materials and to simulate the physical interactions of the device with its environment, as well as to represent complex geometries of the IDTs or to study the effect of manufacturing variations, all of these tasks can be very complex if an analytical solution is desired.…”

Section: Introductionmentioning

confidence: 99%

Numerical analysis and design of a high-frequency surface acoustic wave transducer: influence of piezoelectric substrates and IDTs configurations

Fernandez-Garcia,

Solis-Tinoco,

Arce

et al. 2023

Preprint

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The development of SAW transducers requires a series of steps ranging from material selection, geometry design, as well as, the selection of fabrication techniques for their characterization and validation process. Here, we use the finite element method in COMSOL Multiphysics to present a methodology and a detailed analysis of the design of a SAW transducer in a delay line configuration. First, we simulate single-finger and double-finger configurations of IDTs on LiNbO3 in 64°YX and LiNbO3 128°YX orientation, with the objective of 1) comparing the simulation results with the analytical delta model to validate the simulation process, presenting Pearson correlation values ranging from 0. 76 to 0.84. 2) calculate a maximum frequency value obtainable for those configurations from a resolution of 5 microns in the photolithography technique, used for the fabrication of SAW transducers. Next, we extended the analysis to study a specific transducer design made to operate at a resonant frequency of 97 MHz. In order to determine the influence of piezoelectric material and IDT configuration we compared identical designs on 128°YX and 64°YX orientations of LiNbO3 with single and double finger configurations and adding the SPUDT configuration. We observed the best results for the single-finger IDT configuration in 128°YX LiNbO3 orientation compared to the other variants through its insertion loss level of -7.29 dB, its average sidelobe level of 18.63 dB, and its average transition band slope for the main lobe of 119.59 dB/MHz. The results obtained can serve as a guide for new researchers or students to expand the use of numerical tools in the design of SAW transducers and SAW devices.

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“…The most effective methods are based on numerical analysis such as Green’s function and the coupling-of-modes method, which are widely used to analyze and optimize SAW device designs [13,14,15]. Other methods for analyzing SAW devices are based on impulse response, transmission matrices, and equivalent circuit models, but they are not able to accurately reproduce all the behaviors of SAW devices—especially estimating all the electromechanical effects and multiple order effects on the device’s function [16,17,18,19]. Many years ago, a research team proposed the use of cascaded equivalent circuits for the SAW interdigital transducer (IDT) [20].…”

Section: Introductionmentioning

confidence: 99%

Finite Element Analysis for Surface Acoustic Wave Device Characteristic Properties and Sensitivity

Wang

Green

Guldiken

et al. 2019

Sensors

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The most vital step in the development of novel and existing surface acoustic wave (SAW)-based sensors and transducers is their design and optimization. Demand for SAW devices has been steadily increasing due to their low cost, portability, and versatility in electronics, telecommunications, and biosensor applications. However, a full characterization of surface acoustic wave biosensors in a three-dimensional (3D) finite element model has not yet been developed. In this study, a novel approach is developed for analyzing shear horizontal Love wave resonator devices. The developed modeling methodology was verified using fabricated devices. A thorough analysis of the 3D model and the experimental device was performed in this study including scattering parameters (S-parameters), reflection coefficient parameters, transmission parameters, and phase velocity. The simulated results will be used as a design guideline for future device design and optimization, which has thus far resulted in close matching between prediction and experimental results. This manuscript is the first to demonstrate a 3D finite element model to correlate the sensitivity of the SAW device with the magnitude of the phase shift, the real and imaginary part of the response, insertion loss, and the frequency shift. The results show that the imaginary part of the response shift has a higher sensitivity compared to other parameters.

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SAW Parameters Analysis and Equivalent Circuit of SAW Device

Cited by 11 publications

References 46 publications

An Improved Method to Compute the Mutual Capacitance between Interdigital Transducers in Radio Frequency Surface Acoustic Wave Filters

An Improved Method to Compute the Mutual Capacitance between Interdigital Transducers in Radio Frequency Surface Acoustic Wave Filters

Numerical analysis and design of a high-frequency surface acoustic wave transducer: influence of piezoelectric substrates and IDTs configurations

Finite Element Analysis for Surface Acoustic Wave Device Characteristic Properties and Sensitivity

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