2009 IEEE International Frequency Control Symposium Joint With the 22nd European Frequency and Time Forum 2009
DOI: 10.1109/freq.2009.5168151
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SAW pressure sensor for vacuum control applications

Abstract: A new kind of surface acoustic wave (SAW) sensor has been developed in order to measure sub-atmospheric pressure below 100 mTorr with accuracy better than 0.1 mTorr. It provides an efficient measuring solution in a pressure range inaccessible in past by conventional diaphragm-based SAW sensors. Indeed, due to the small bending force in low pressure and limited sensitivity, diaphragm-based SAW sensors are only suited to monitor relatively high pressure with a precision hardly better than 0.5 Torr. In order to r… Show more

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Cited by 4 publications
(2 citation statements)
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“…Pressure sensors are widely used in space pressurized structures and environments. Various solutions in the literature enable to sense changes in the pressure from the atmospheric pressure (~760 Torr) down to high vacuum (~6.5 × 10 −6 Torr) [4][5][6][7][8][9][10][11]. These solutions are thermal sensors that depend on the heat transfer principle [7][8][9][10][11], or they rely on frequency shifts caused by damping variation under different pressures [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
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“…Pressure sensors are widely used in space pressurized structures and environments. Various solutions in the literature enable to sense changes in the pressure from the atmospheric pressure (~760 Torr) down to high vacuum (~6.5 × 10 −6 Torr) [4][5][6][7][8][9][10][11]. These solutions are thermal sensors that depend on the heat transfer principle [7][8][9][10][11], or they rely on frequency shifts caused by damping variation under different pressures [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…Various solutions in the literature enable to sense changes in the pressure from the atmospheric pressure (~760 Torr) down to high vacuum (~6.5 × 10 −6 Torr) [4][5][6][7][8][9][10][11]. These solutions are thermal sensors that depend on the heat transfer principle [7][8][9][10][11], or they rely on frequency shifts caused by damping variation under different pressures [4][5][6]. However, most of the proposed solutions operate at high power and require heavy and oversized circuitry to be used (see Table II), not being able to comply with low power, light weight, and small footprint requirements for mobile applications [1,2].…”
Section: Introductionmentioning
confidence: 99%