SAW reflection from surface inhomogeneities of isotropic and anisotropic substrates

Abstract

The reflection of SAW from single steps as well as single and multiple grooves, projections, and strips on halfinfinite isotropic (fused quartz) and piezoelectric (LiNbO3) substrates is investigated by FEM. A perfectly matched layer (PML) is used in order to truncate the computational domain. The amplitude of the reflected SAW is found by applying FFT to the scattered field on the surface of the substrate.