Scalability of Capacitive RF MEMS Switches

Ulm, Markus; Reimann, Mathias; Walter, Thomas; Müller-Fiedler, Roland; Kasper, E.

doi:10.1007/978-3-642-59497-7_356

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2003

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“…LG [61], Bosch [62] and IMEC/AMIS [63][64][65]. A photograph of the switch developed at IMEC/AMIS together with the RF characteristics is shown in figure 4 [64].…”

Section: Switchesmentioning

confidence: 99%

MEMS for wireless communications: from RF-MEMS components to RF-MEMS-SiP

Tilmans

Raedt

Beyne

2003

J. Micromech. Microeng.

220

114

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Wireless communication has led to an explosive growth of emerging consumer and military applications of radio frequency (RF), microwave and millimeter wave circuits and systems. Future personal (hand-held) and ground communications systems as well as communications satellites necessitate the use of highly integrated RF frontends, featuring small size, low weight, high performance and low cost. Continuing chip scaling has contributed to the extent that off-chip, bulky passive RF components,

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“…LG [61], Bosch [62] and IMEC/AMIS [63][64][65]. A photograph of the switch developed at IMEC/AMIS together with the RF characteristics is shown in figure 4 [64].…”

Section: Switchesmentioning

confidence: 99%