2017
DOI: 10.1364/ome.7.001514
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Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation

Abstract: Abstract:Towards building large-scale integrated photonic systems for quantum information processing, spatial and spectral alignment of single quantum systems to photonic nanocavities is required. Here, we demonstrate spatially targeted implantation of nitrogen vacancy (NV) centers into the mode maximum of 2-d diamond photonic crystal cavities with quality factors up to 8000, achieving an average of 1.1 ± 0.2 NVs per cavity. Nearly all NV-cavity systems have significant emission intensity enhancement, reaching… Show more

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Cited by 29 publications
(27 citation statements)
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References 45 publications
(36 reference statements)
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“…An alternative strategy consists of the fabrication of photonic structures such as SIL or photonic crystal cavity registered to a pre‐characterized color center . The recent availability of deterministic placement enabled the fabrication of individual NV centers and SiV centers (Figure e) at targeted positions of diamond photonic structures with high spatial accuracy. Nevertheless, the sub‐optimal center formation yield requires the implantation of tens of ions to maximize the probability of obtaining an individual emitter, with a subsequent post‐selection of the photonic devices required.…”
Section: Deterministic Placement Of Color Centersmentioning
confidence: 99%
“…An alternative strategy consists of the fabrication of photonic structures such as SIL or photonic crystal cavity registered to a pre‐characterized color center . The recent availability of deterministic placement enabled the fabrication of individual NV centers and SiV centers (Figure e) at targeted positions of diamond photonic structures with high spatial accuracy. Nevertheless, the sub‐optimal center formation yield requires the implantation of tens of ions to maximize the probability of obtaining an individual emitter, with a subsequent post‐selection of the photonic devices required.…”
Section: Deterministic Placement Of Color Centersmentioning
confidence: 99%
“…Consequently, several approaches to enhance the collection efficiency have been followed by modifying the directivity of emission such as using an optimal crystal orientation, [31] fabricating solid immersion lenses around NV centers [5,32] or incorporating NV centers in nanopillars, [33,34] nanowires, [35] waveguides [36,37] or metalenses. [38] Furthermore, the collection efficiency can be modified by coupling NV centers to whispering gallery [36,39] or photonic crystal (PhC) cavities [40][41][42][43][44] as well as to plasmonic structures. [45,46] In addition, by such a coupling the local density of states at the emitter's position and hence its spontaneous emission rate may be enhanced or, correspondingly, the spontaneous emission lifetime reduced by the Purcell-factor F. [47] In addition to a reduced lifetime, the coupling of NV centers to a cavity has the advantage that more than the usual 3 % of the photons are emitted into the zero phonon line (ZPL).…”
Section: Arxiv:190707602v1 [Quant-ph] 17 Jul 2019mentioning
confidence: 99%
“…The results indicate that the collection efficiency for Grating A is within ∼ 15.9% of η max under ∼ 20 nm of NV displacement. Such alignment accuracy can be achieved using the self-aligned ion implantation technique [53,54].…”
Section: Tolerance Of the Chirped Circular Gratings To Nv Displacementmentioning
confidence: 99%