“…Obviously, the full filling of functional liquid-like (thermoplastic, UV-or thermocurable) materials into the cavities of a mold at atmospheric pressure would be highly desirable for the accuracy and yield of various molding processes, including micro/nanoimprinting 11,12 capillary force lithography, 13,14 micromolding in capillaries, 15−17 microtransfer molding (μTM), 18,19 and so forth, which were claimed to be of a nanoscale resolution. However, this has been difficult, if not impossible, especially for a mold structure with high aspect ratio, varying size/shape, or isolated cavities (deep microholes or isolated trenches, pockets of varying sizes, for instance), within which the air can inevitably be trapped during the molding process.…”