“…In studies of bulk solid surfaces [55][56][57][58][59][60][61] and thin films [51,[62][63][64][65] made of various materials including Al, Au, Ag, Cu, GaAs, GaP, Si, Ti, ZnSe and Ni, scale effects on hardness with respect to depth of penetration and decreasing film thickness have been reported. For example, Pharr and Oliver [57] and Bhushan et al [59], found that decreasing indentation depth resulted in higher hardness of Ag and Si surfaces, respectively.…”