Scaling aerosol assisted chemical vapour deposition: Exploring the relationship between growth rate and film properties

Powell, Michael; Potter, Dominic B.; Wilson, Richard Ashby; Darr, Jawwad A.; Parkin, Ivan P.; Carmalt, Claire J.

doi:10.1016/j.matdes.2017.05.017

Cited by 51 publications

(48 citation statements)

References 55 publications

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“…We have been able to show that AACVD can be scaled from 10 to 100 snmmin À1 without loss of functionality. [69] This shows that AACVDi sas calable process. However, additional work is required to get it to rates that are appropriate for industrial applications.…”

Section: Currentchallenges and Future Directionsofa Acvdmentioning

confidence: 83%

“…Therefore, increasing the deposition rate whilst being able to maintain the functional properties of the deposited thin films and high sustainability of the process, is a key area that needs to be established. We have been able to show that AACVD can be scaled from 10 to 100 s nm min −1 without loss of functionality . This shows that AACVD is a scalable process.…”

Section: Aerosol Routes To Sustainable Manufacture Of Materialsmentioning

confidence: 99%

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Aerosols: A Sustainable Route to Functional Materials

Powell

Carmalt

2017

Chemistry A European J

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Sustainability is an increasingly important topic in the design and manufacture of materials, with the need to reduce the environmental impact of producing materials being of paramount significance. A competing interest to this is the ability to produce functional materials in large volumes from a fast, on-line process, which can be integrated easily into existing industrial setups. Herein, we present aerosol-assisted chemical vapour deposition (AACVD) routes to advanced functional materials. We will show that by careful design of precursors and manipulation of deposition conditions, it is possible to achieve high sustainability whilst maintaining fast growth rates and large scale production of thin film functional materials.

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Section: Currentchallenges and Future Directionsofa Acvdmentioning

confidence: 83%

Section: Aerosol Routes To Sustainable Manufacture Of Materialsmentioning

confidence: 99%

Aerosols: A Sustainable Route to Functional Materials

Powell

Carmalt

2017

Chemistry A European J

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“…2 Another advantage of AACVD is that doping is easily achievable, since the stoichiometric ratio of dopant precursors to lm precursors in solution can be closely related to the stoichiometric ratio in the resultant lm. 3 By comparison, doping lms using APCVD requires precise control over gas ow rates, which can be unreliable, and difficult to reproduce.…”

Section: Introductionmentioning

confidence: 99%

“…Furthermore, recent work by Powell et al has demonstrated that AACVD has the potential to be scaled up for industrial depositions. 3 TCOs are a class of semiconductor material, which combine optical transparency with electrical conductivity. This grants them a wide range of applications in optoelectronic devices, such as solar cells, touch screens, light emitting diodes (LEDs) and liquid crystal displays (LCDs).…”

Section: Introductionmentioning

confidence: 99%

The effect of solvent on Al-doped ZnO thin films depositedviaaerosol assisted CVD

2018

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“…The deposition of tin oxide thin films have been reported by using various methods such as spray pyrolysis, electron beam evaporation, magnetic sputtering and chemical vapor deposition . Among these techniques, aerosol assisted chemical vapour deposition (AACVD) has emerged as a promising technique to deposit large area films at high growth rate .…”

Section: Introductionmentioning

confidence: 99%

A Facile Synthesis of Organotin(IV) Carboxylates: Application as Single Source Precursor for Deposition of Tin Oxide Thin Films and Evaluation of Biological Activities

et al. 2018

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Herein, we report synthesis of novel organotin(IV) carboxylates i.e; [(C6H5)3Sn(C10H14NO3)] B1 and [(C4H9)3Sn(C10H14NO3)] B2 by reacting triphenyltin hydroxide and bis(tributyltin) oxide with as‐prepared ligand 3‐cyclohexylcarbamoyl‐acrylic acid A under inert atmosphere. The as‐synthesized complexes were characterized by elemental analysis (CHNS), fourier transform infrared spectroscopy (FTIR), nuclear magnetic resonance spectroscopy(1H‐NMR, 13C‐NMR) and mass spectrometry (EI‐MS). The structures of both as‐prepared tin complexes B1 and B2 were determined by single crystal X‐ray crystallography. Thermogravimetric analysis has shown single step decomposition of both these complexes. The as‐prepared complexes were used as single source precursor for the deposition of tin oxide thin films at 350 °C and 400 °C by aerosol assisted chemical deposition (AACVD) on bare and at 400 °C on carbon nanodots pre‐coated glass substrate. The as‐deposited thin films were characterized by powdered X‐rays diffraction (pXRD), field emission scanning electron microscope (FE‐SEM) and energy dispersive X‐rays spectroscopy (EDX). Furthermore, antimicrobial, anti‐oxidant and cytotoxicity studies of both complexes showed moderate to good biological activities. Thus, as‐prepared novel complexes have potential applications in materials as‐well as in medicinal chemistry.

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Scaling aerosol assisted chemical vapour deposition: Exploring the relationship between growth rate and film properties

Cited by 51 publications

References 55 publications

Aerosols: A Sustainable Route to Functional Materials

Aerosols: A Sustainable Route to Functional Materials

The effect of solvent on Al-doped ZnO thin films depositedviaaerosol assisted CVD

A Facile Synthesis of Organotin(IV) Carboxylates: Application as Single Source Precursor for Deposition of Tin Oxide Thin Films and Evaluation of Biological Activities

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